Optics and Precision Engineering, Volume. 30, Issue 15, 1828(2022)
Optimization of large-aperture micro-nano structure planar optical element
The metalens constructed by the micro-nano structure array is not only small and lightweight, but also has a multi-functional design that can be realized through a composite structure. The existing metalens diameters are generally in the order of micrometers. For a metalens such as a centimeter-level diameter, the number of micro-nano structure units contained in it can reach billions. If these massive micro-nano structures are drawn by modeling them sequentially, the layout file will inevitably be too large, such that the drawing time is so long that the layout cannot be opened. To solve this problem, this study proposes a circular layout metalens design method based on the layout design software L-Edit. This method uses binary coding to divide the metalens into blocks to compress the layout file. Numerical simulation results show that the designed metalens achieves sub-wavelength focusing. For the 50 mm diameter metalens, the layout file size obtained using the proposed layout drawing method is 176 MB. This is much smaller than the layout file size (3.70 TB) generated by the one-by-one modeling and drawing method. This study proves that an efficient compression of massive data of a large-aperture metalens in the layout design ensures the manufacturability of the design of large-aperture metalens elements.
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Xinrui CAO, Weiguo LIU, Shun ZHOU, Xueping SUN, Yechuan ZHU. Optimization of large-aperture micro-nano structure planar optical element[J]. Optics and Precision Engineering, 2022, 30(15): 1828
Category: Design,Fabrication and Application of Planar Optical Elements
Received: Dec. 7, 2021
Accepted: --
Published Online: Sep. 7, 2022
The Author Email: Yechuan ZHU (zyc_xatu@126.com)