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Laser & Optoelectronics Progress, Volume. 57, Issue 15, 153004(2020)

Design and Analysis of Micro-Spectrometer with High Resolution and Wide Spectral Range

Hui Zhong*
Author Affiliations
  • Key Laboratory for Advanced Optical Remote Sensing Technology of Beijing, Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
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    References (15)
    Cited By (6)
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    Figures & Tables(11)
    Principle of F-P interferometer

    Fig. 1. Principle of F-P interferometer

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    Spectral transmittance curve of F-P interferometer

    Fig. 2. Spectral transmittance curve of F-P interferometer

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    Schematic diagram of micro-spectrometer

    Fig. 3. Schematic diagram of micro-spectrometer

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    Curved grating spectrometer. (a) Structure diagram; (b) spot diagram

    Fig. 4. Curved grating spectrometer. (a) Structure diagram; (b) spot diagram

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    Optical system structure of micro-spectrometer

    Fig. 5. Optical system structure of micro-spectrometer

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    Single scan of a wide band light source. (a) Spot diagram; (b) spectral diagram

    Fig. 6. Single scan of a wide band light source. (a) Spot diagram; (b) spectral diagram

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    Output spectrum of F-P interferometer

    Fig. 7. Output spectrum of F-P interferometer

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    Reconstructed Raman spectral of Benzonitrile

    Fig. 8. Reconstructed Raman spectral of Benzonitrile

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    • Table 1. Technical parameters of mainstream Raman spectrometers

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      Table 1. Technical parameters of mainstream Raman spectrometers

      ParameterATR6600ATR3100Mira M-2NanoRamProgeny
      ManufacturerOptoskyOptoskyMetrohmB&WTEKRigaku
      Spectral range /cm-1200-2800250-2400400-2300200-2400200-2500
      Spectral resolution /cm-110-161012-14108-11
      Size /mm×mm×mm225×110×50300×225×132144×83×64250×110×60299×81×74
      Weight /g1200350082015451500
      Sensor size /mm12.825.612.812.812.8

    • Table 2. Specific parameters of micro-spectrometer

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      Table 2. Specific parameters of micro-spectrometer

      ParameterValue
      spectral range /cm-1150-3200
      spectral resolution /cm-1≤6
      NA0.22
      F-P finesse38
      F-P XFSR /cm-1227.3-221.5
      F-P clear aperture /mm3
      grating spectrometerspectral resolution /nm≤20
      R1 /mm31.3
      R2 /mm5.32
      R3 /mm10
      h /μm22-22.57
      narrow hole aperture /μm50
      grating groove /mm2400
      image size /mm2.4

    • Table 3. Reconstructed peaks versus ASTM standards of Benzonitrile

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      Table 3. Reconstructed peaks versus ASTM standards of Benzonitrile

      ASTMpeaks /cm-1Reconstructedpeaks /cm-1ASTMrelativeintensityReconstructedrelativeintensity
      460.9459.91510
      548.5548.977
      751.3751.0109
      767.1768.01010
      1000.71000.9100100
      1026.61027.51310
      1177.91178.12017
      1192.61192.72521
      1598.91598.23630
      2229.42230.06763
      3072.33072.22619
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    Hui Zhong. Design and Analysis of Micro-Spectrometer with High Resolution and Wide Spectral Range[J]. Laser & Optoelectronics Progress, 2020, 57(15): 153004

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    Paper Information

    Category: Spectroscopy

    Received: Nov. 19, 2019

    Accepted: Dec. 11, 2019

    Published Online: Aug. 4, 2020

    The Author Email: Hui Zhong (zhonghui0412@163.com)

    DOI:10.3788/LOP57.153004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology