Optoelectronic Technology, Volume. 39, Issue 2, 123(2019)

Mechanism and Improvement on High Temperature Crosstalk in Vehicle TFT LCD Devices Reliability Test

SU Lei*, YANG Xiaofei, LI Xinghua, LIU Xu, MOU Xun, and MENG Jia
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    The factors of vehicle LCD high temperature crosstalk in reliability test were studied. It was found that the bigger the N+ step remain of TFT channel was, the worse the high temperature crosstalk became. The N+ step remain could be improved by increasing ashing time of N+ etch process. Thickness of gate insulator would also affect the crosstalk. The DOE experiments show that the significant factors affecting reliability crosstalk are N + step remain of TFT channel and thickness of gate insulator.

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    SU Lei, YANG Xiaofei, LI Xinghua, LIU Xu, MOU Xun, MENG Jia. Mechanism and Improvement on High Temperature Crosstalk in Vehicle TFT LCD Devices Reliability Test[J]. Optoelectronic Technology, 2019, 39(2): 123

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    Paper Information

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    Received: Apr. 17, 2019

    Accepted: --

    Published Online: Jul. 31, 2019

    The Author Email: Lei SU (suleicd@boe.com.cn)

    DOI:10.19453/j.cnki.1005-488x.2019.02.011

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