Opto-Electronic Engineering, Volume. 51, Issue 2, 230211(2024)
Decoupling study and noise analysis of multi-degree-of-freedom deformation measurement method for space gravitational wave detection telescope
Figures & Tables(16)
Fig. 1. Schematic diagram of the composition of a three-degree-of-freedom deformation measurement system
Fig. 2. Schematic diagram of the three-degree-of-freedom deformation measurement system
Fig. 4. Schematic diagram of the decoupling mathematical model for the three-degree-of-freedom deformation measurement system
Fig. 7. (a) Schematic diagram of the actual measurement path; (b) Zemax optical path modeling diagram
Fig. 9. Laboratory temperature and vibration level. (a) Temperature test chart; (b) Vibration test chart
Table 1. Advantages and disadvantages of multiple-degree-of-freedom measurement methods
View tableView in ArticleTable 1. Advantages and disadvantages of multiple-degree-of-freedom measurement methods
方法 优点 缺点 电学法[ 20 ]电容测量 精度高、稳定性好、测量速度快、反应时间快 无法实现非接触测量，测量范围小 电感测量 精度高、对工作环境要求低 光学法[ 21 ]光杠杆 测量原理简单，易操作，稳定性高 灵敏度低 多路干涉 响应速度快，灵敏度在1 mHz以上占有优势，测量范围更大，角度测量非线性更小 结构复杂，对环境敏感，对结构复杂微 变形的测量和表征能力有限 差分波前 角度测量简单高效 只能进行角度测量且精度受限于探测器
Table 2. Test the relationship between the rigid body displacement of the mirror and the phase difference received by the photodetector
View tableView in ArticleTable 2. Test the relationship between the rigid body displacement of the mirror and the phase difference received by the photodetector
相对位移 相位差 PD1 PD2 PD3 初始位置 0 0 0 沿光轴方向+z平移20 nm 0.47 0.47 0 Rx方向旋转1.7 µrad 0.66 0.47 0.61 垂直光轴方向+y平移20 nm 0 0 0.30
Table 3. Error sensitivity analysis of the measurement system with multiple degrees of freedom
View tableView in ArticleTable 3. Error sensitivity analysis of the measurement system with multiple degrees of freedom
自由度 比值 z dI : S : α = 1 : 0 : 0 Rx dI : S : α= 10000 : 1 : 0 y dI : S : α= 10000 : 1 : 1
Table 4. Allocation and requirements of optical path noise indicators for the telescope deformation measurement system
View tableView in ArticleTable 4. Allocation and requirements of optical path noise indicators for the telescope deformation measurement system
测量系统组成部分 主要噪声源 噪声分配 (nm/Hz1/2@1 mHz) 备注 激光光源 激光频率噪声 3 要求激光频率噪声δf小于4.2×107<Hz/Hz1/2@1 mHz 前端光程耦合噪声 声光调制耦合噪声 1 等效位移噪声<1 nm/Hz1/2@1 mHz 光纤温度耦合噪声 2 光纤温度波动δT≤15 mK/Hz1/2@1 mHz 集成光学 器件平台 温度位移耦合噪声 8 温度位移耦合系数dS/dT=70 nm/K，测试环境温度波动δT≤15 mK/Hz1/2@1 mHz 振动位移耦合噪声 2 振动位移耦合系数dS/dx=0.3×10−3 m/m，测试环境振动波动δX≤1×10−3 m/s /Hz1/2@1 mHz 空气折射率噪声 2 温度波动δT≤15 mK/Hz1/2@1 mHz 偏振噪声 2 等效位移噪声<2 nm/Hz1/2@1 mHz 杂散光噪声 3 控制杂散光强度相较于主光束低于−20 dB 信号采集 数据处理 探测器耦合噪声 1 相对强度噪声需低于−100 dB/Hz@1 mHz 相位读取噪声 0.01 要求相位计等效位移本底噪声是0.01 nm/Hz1/2@1 mHz 测量系统总体噪声 10
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Jian Luo, Jie Song, Sijun Fang, Fanle Kong, Yong Yan. Decoupling study and noise analysis of multi-degree-of-freedom deformation measurement method for space gravitational wave detection telescope[J]. Opto-Electronic Engineering, 2024, 51(2): 230211
Paper Information
Category: Article
Received: Aug. 30, 2023
Accepted: Feb. 7, 2024
Published Online: Apr. 26, 2024
The Author Email: Yan Yong (闫勇)
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