Research on electrostatically driven MEMS optical phase shifter with integrated comb capacitive displacement sensor

HAN Yuwei; XIA Yuhu; ZHOU Biqing; CAI Minli; WANG Xiaoyue; WU Yaming

doi:10.20027/j.gncq.2025.0030

Journal of Functional Materials and Devices, Volume. 31, Issue 4, 292(2025)

Research on electrostatically driven MEMS optical phase shifter with integrated comb capacitive displacement sensor

HAN Yuwei^1,2, XIA Yuhu^1,2, ZHOU Biqing^1,2, CAI Minli^1,2, WANG Xiaoyue¹, and WU Yaming^1,2、*

Author Affiliations

¹Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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HAN Yuwei, XIA Yuhu, ZHOU Biqing, CAI Minli, WANG Xiaoyue, WU Yaming. Research on electrostatically driven MEMS optical phase shifter with integrated comb capacitive displacement sensor[J]. Journal of Functional Materials and Devices, 2025, 31(4): 292

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Paper Information

Received: May. 2, 2025

Accepted: Aug. 22, 2025

Published Online: Aug. 22, 2025

The Author Email: WU Yaming (yamingwu@mail.sim.ac.cn)

DOI:10.20027/j.gncq.2025.0030

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology