Journal of Functional Materials and Devices, Volume. 31, Issue 4, 292(2025)

Research on electrostatically driven MEMS optical phase shifter with integrated comb capacitive displacement sensor

HAN Yuwei1,2, XIA Yuhu1,2, ZHOU Biqing1,2, CAI Minli1,2, WANG Xiaoyue1, and WU Yaming1,2、*
Author Affiliations
  • 1Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    We designed and fabricated an electrostatically actuated micro-electro-mechanical system (MEMS) optical phase shifter incorporating a comb capacitive displacement sensor. To overcome the technical challenges of high driving voltage and inadequate control precision in current MEMS optical phase shifters, this study employed a hollow serpentine elastic beam structure to reduce the out-of-plane vertical stiffness of the elastic beam within the constrained chip dimensions, thereby lowering the actuation voltage. Furthermore, a comb-capacitive displacement sensor was integrated to facilitate an optical mirror displacement sensing system, significantly enhancing control accuracy. Experimental results indicate that at a driving voltage of 59 V, the micromirror achieves an optical phase modulation of 2.139 5π rad. The integrated comb-capacitive sensor demonstrates a detection error of less than 0.5 fF, corresponding to an optical phase-shifting error below 0.016 2π rad. This device shows promising potential for applications in optical communication systems and vector optical phased arrays as a phase modulation element.

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    HAN Yuwei, XIA Yuhu, ZHOU Biqing, CAI Minli, WANG Xiaoyue, WU Yaming. Research on electrostatically driven MEMS optical phase shifter with integrated comb capacitive displacement sensor[J]. Journal of Functional Materials and Devices, 2025, 31(4): 292

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    Paper Information

    Received: May. 2, 2025

    Accepted: Aug. 22, 2025

    Published Online: Aug. 22, 2025

    The Author Email: WU Yaming (yamingwu@mail.sim.ac.cn)

    DOI:10.20027/j.gncq.2025.0030

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