Acta Optica Sinica, Volume. 29, Issue 6, 1724(2009)

Optical Constant and Dielectric Properties of Erbium Oxide Thin Films

Liu Chuanbiao1、*, Wei Aixiang1, and Liu Yi2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(19)

    [1] [1] V. Mikhelashvili, G. Eisenstein, F. Edelmann. Characteristics of electron-beam-gun-evaporated Er2O3 thin films as gate dielectrics for silicon[J]. J.Appl. Phys.,2001,90(10):5447~5449

    [2] [2] Mikhelashvili V., Eisenstein G., Edlman F.. Structural properties and electrical characteristics of electron-beam gun evaporated erbium oxide films[J]. Appl. Phys., 2004, 80(12):2156~2158

    [3] [3] M. P. Singh, C. S. Thakur, K. Shalini et al.. Structural and electrical characterization of erbium oxide films grown on Si.100. by low-pressure metalorganic chemical vapor deposition[J].Appl. Phys. Lett.,2003, 83(14):2889~2891

    [4] [4] M. Miritello, R. Lo Savio, A.M. Piro et al.. Optical and structural properties of Er2O3 films grown by magnetron sputtering[J]. J.Appl. Phys., 2006,100(1):013502.

    [5] [5] Wenxiu Que, Y. Zhou, Y. L. Lam et al.. Photoluminescence of erbium oxide nanocrystals/TiO2/γ-glycidoxypropyltrimethoxysilane (GLYMO) composite sol-gel thin films derived at low temperature[J]. J. Appl. Phys., 2001,89(5):3058~3060

    [8] [8] E.V. Vanin, A.M. Grishinb, S.I. Khartsev et al..Broadband photoluminescence from pulsed laser deposited Er2O3 films[J]. Journal of Luminescence, 2006,121:256~258

    [9] [9] V.A. Rozhkov, M.A. Rodionov, Antireflection properties of erbium oxide films[J]. Tech. Phys. Lett., 2005, 31(1): 77~78

    [10] [10] K.M. Hubbard, B.F. Espinoza, Corrosion-resistant erbium oxide coatings by organometallic chemical vapor deposition[J]. Thin Solid Films, 2000, 366(1~2):175~180

    [11] [11] S. Chen, Y.Y. Zhu, R. Xu et al.. Superior electrical properties of crystalline Er2O3 films epitaxially grown on Si substrates[J]. Appl. Phys. Lett., 2006,89(22): 222902-1~222902-3

    [12] [12] V. Mikhelashvili, G. Eisenstein, F. Edelmann et al.. Structural and electrical properties of electron beam gun evaporated Er2O3 insulator thin films[J]. Appl. Phys. Lett., 2002,95(2):613~620

    [13] [13] M.P. Singh, C.S. Thakur, K. Shalini et al.. Structural and electrical characterization of erbium oxide films grown on Si.100. by low-pressure metalorganic chemical vapor deposition[J].Appl. Phys. Lett., 2003,83(14): 2889~2891

    [14] [14] J. Paivasaari, J. Niinisto, K. Arstila et al.. High growth rate of erbium oxide thin films in atomic layer deposition from (CpMe)3 Er and water precursors[J]. Chem. Vapor. Depos., 2005, 11(10):415~419

    [15] [15] Azzam N. M. A., Bashara N. M.. Ellipsometry and Polarized Light[M]. North-Holland publishing Co., 1977

    [16] [16] Maria M. Giangregorio, Alberto Sacchetti, Maria Losurdo et al.. Correlation between structure and properties of Er2O3 nanocrystalline thin films[J]. Journal of Non-Crystalline Solids, 2008, 354(19~25): 2853~2857

    [17] [17] V. Mikhelashvili, G. Eisenstein, F. Edelman et al.. Structural and electrical properties of electron beam gun evaporated Er2O3 insulator thin films[J]. J. Appl. Phys., 2004, 95(2):613~620

    [18] [18] O. Medenbach, D. Dettmar, R. D. Shannon et al.. Refractive index and optical dispersion of rare earth oxides using a small-prism technique[J]. J. Opt. A, Pure Appl. Opt., 2001, 3(3): 174~177

    [19] [19] Liu Enke, Zhu Bingsheng, Luo Jinsheng. Semiconductor Physics[M].Beijing:Publishing House Of Electronics Industry(Edition 7), 2008,319

    CLP Journals

    [1] Wang Guande, Chen Baoxue, Hiromi Hamanaka, Mamoru Iso. Research on Cut-Off Process of Optical Stopping Effect in Amorphous As2S8 Thin-Film Waveguide[J]. Acta Optica Sinica, 2011, 31(12): 1213002

    [2] Liu Yongli, Zhang Jinlong, Wang Zhanshan. Advanced Study and Generalization of Rotation-Incidence-Plane Method[J]. Acta Optica Sinica, 2014, 34(7): 712008

    Tools

    Get Citation

    Copy Citation Text

    Liu Chuanbiao, Wei Aixiang, Liu Yi. Optical Constant and Dielectric Properties of Erbium Oxide Thin Films[J]. Acta Optica Sinica, 2009, 29(6): 1724

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Oct. 7, 2008

    Accepted: --

    Published Online: Jun. 8, 2009

    The Author Email: Chuanbiao Liu (liuchuanbiao@yahoo.cn)

    DOI:

    Topics