Fig. 1. Femtosecond laser release resonator and experimental setup

Fig. 2. Laser propagation process and laser intensity modeling

Fig. 3. Finite-difference time-domain simulation of laser intensity

Fig. 4. Normalized longitudinal electric field map

Fig. 5. Comparison of laser release width for two focusing methods

Fig. 6. Release results for different release parameters on the surface under laser focusing

Fig. 7. Release widths of the upper and lower surfaces focused separately at a single pulse energy of 2.2 μJ

Fig. 8. Laser-released surface quality