The fused silica micro-hemisphere resonator gyroscope is one of the most promising miniature vibratory gyroscopes， offering advantages such as a simple structure， high precision， and strong anti-interference capability. The micro-hemisphere resonator is the core component of the gyroscope， and its fabrication process is critical for performance. This study proposed a method to improve release quality while maintaining processing efficiency. In this study， a femtosecond laser was used for the release process， with the laser focused on the lower surface of the fused silica resonator through a silicon reflective target placed beneath it. This setup enhanced the intensity of the femtosecond laser inside the material， improving both the release speed and surface quality. A simplified mathematical model for laser intensity distribution inside fused silica and FDTD simulations were employed to analyze the laser energy field during femtosecond laser processing. The optimal process parameters were determined from the analysis. Experimental results show that when the single pulse energy is set at 2.2 μJ and the release speed is between 0.2 mm/s and 0.5 mm/s， a 300 μm thick quartz sheet was released with a release width ranging from 34.31 μm to 35.16 μm， and a surface roughness less than 400 nm. The release width increased by approximately 236% compared to the conventional focusing on the upper surface. This method effectively improves the release quality of the micro-hemisphere resonator， providing a solid technical foundation for the fabrication of high-quality fused silica resonators.