Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Laser & Optoelectronics Progress, Volume. 62, Issue 13, 1300014(2025)

Research Progress of Stress Detection Technology for Coated Films

Molan Yang1,2, Wenkuan Xu1,2、*, Yanchu Yang1,2, Xiang Zhao2, and Yitong Bi1,2
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2University of Chinese Academy of Sciences, Beijing 101408, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (19)
    Equations (22)
    References (78)
    Tools
    Paper Information
    Topics
    Figures & Tables(19)
    Summary of detection methods for residual stress of coated films

    Fig. 1. Summary of detection methods for residual stress of coated films

    Download full size
    Schematic of mechanical cantilever beam[17]

    Fig. 2. Schematic of mechanical cantilever beam[17]

    Download full size
    Schematic of lever stress tester [24]

    Fig. 3. Schematic of lever stress tester [24]

    Download full size
    Newton's ring detection schematic[27]

    Fig. 4. Newton's ring detection schematic[27]

    Download full size
    Improved Newton's ring detection diagram[30]

    Fig. 5. Improved Newton's ring detection diagram[30]

    Download full size
    Schematic of multi-beam deflection method[31]

    Fig. 6. Schematic of multi-beam deflection method[31]

    Download full size
    Simplified optical path diagram using multi-beam deflection method[31]

    Fig. 7. Simplified optical path diagram using multi-beam deflection method[31]

    Download full size
    Principle diagram of laser beam deflection experiment[33]

    Fig. 8. Principle diagram of laser beam deflection experiment[33]

    Download full size
    Schematic of curved optical path[34]

    Fig. 9. Schematic of curved optical path[34]

    Download full size
    Phase shift interference stress detection device[37]

    Fig. 10. Phase shift interference stress detection device[37]

    Download full size
    Schematic of orthogonal grating reflection method[42]

    Fig. 11. Schematic of orthogonal grating reflection method[42]

    Download full size
    Schematic of stress corresponding to lattice change[52]

    Fig. 12. Schematic of stress corresponding to lattice change[52]

    Download full size
    X-ray diffraction geometry[54]

    Fig. 13. X-ray diffraction geometry[54]

    Download full size
    Example of spectrometer[62]

    Fig. 14. Example of spectrometer[62]

    Download full size
    Schematic of atomic force microscopy[66]

    Fig. 15. Schematic of atomic force microscopy[66]

    Download full size
    Operating procedure flowchart

    Fig. 16. Operating procedure flowchart

    Download full size
    Schematic of multilayer film model[69]

    Fig. 17. Schematic of multilayer film model[69]

    Download full size
    Schematic of lattice mismatch and misalignment[69]

    Fig. 18. Schematic of lattice mismatch and misalignment[69]

    Download full size

    • Table 1. Comparison and summary of detection methods

      View table

      Table 1. Comparison and summary of detection methods

      Test methodScope of applicationMeasurement accuracyKey factorAdvantageLimitationDetection object
      Stoney formula method for substrate deformationOverall situationHigh， tens of MPaFilm adhesionSimple operationLack of local stress informationMetal and semiconductor thin films

      Thin film

      vibration method

      		Overall situationHigh，10 MPaCoating uniformityStrong applicabilitySensitive to environmental noiseLarge scalethin film

      method

      X-ray diffraction

      		Local detailsExtremely high， sub MPaElastic modulusDynamic real-time monitoringExpensive costSensor film

      method

      Raman spectroscopy

      		Local detailsHigh， 10 MPaFilm thicknessNon-destructiveComplexity analysisCrystal thin film

      method

      Nanoindentation

      		Local detailsHigh， hPaX-ray propertiesHigh-precisionSmall detection rangeOrder structure
      Atomic force microscopy detectionLocal detailsExtremely high， sub MPaSample structureHigh spatial resolutionLocal detectionSingle crystal polycrystalline thin film
      Finite element analysis technologyGlobal localHigh， sub MPaOptical transparencyHigh-precisionLocalized damageMicro nano materials
    Tools

    Get Citation

    Copy Citation Text

    Molan Yang, Wenkuan Xu, Yanchu Yang, Xiang Zhao, Yitong Bi. Research Progress of Stress Detection Technology for Coated Films[J]. Laser & Optoelectronics Progress, 2025, 62(13): 1300014

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Reviews

    Received: Dec. 17, 2024

    Accepted: Jan. 20, 2025

    Published Online: Jul. 16, 2025

    The Author Email: Wenkuan Xu (xuwk@aoe.ac.cn)

    DOI:10.3788/LOP242434

    CSTR:32186.14.LOP242434

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology