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Acta Optica Sinica, Volume. 43, Issue 13, 1312004(2023)

Ultra-Precision on-Machine Measurement of Fresnel Microstructure Based on Point Autofocus Sensor

Zhikai Yang, Zaozao Chen, Liangliang Mo, and Xinquan Zhang*
Author Affiliations
  • School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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    Article index updated: Mar. 10, 2025

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    Zhikai Yang, Zaozao Chen, Liangliang Mo, Xinquan Zhang. Ultra-Precision on-Machine Measurement of Fresnel Microstructure Based on Point Autofocus Sensor[J]. Acta Optica Sinica, 2023, 43(13): 1312004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 12, 2023

    Accepted: Mar. 6, 2023

    Published Online: Jul. 12, 2023

    The Author Email: Zhang Xinquan (zhangxinquan@sjtu.edu.cn)

    DOI:10.3788/AOS230469

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology