Acta Optica Sinica, Volume. 24, Issue 2, 239(2004)

Study of the Characteristics of the Surface Ripple on Si Material Irradiated by Pulsed Laser

[in Chinese]1,2、*, [in Chinese]2, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]1
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  • 1[in Chinese]
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    References(7)

    [1] [1] Young J F, Preston J S, van Driel H M et al.. Laser induced periodic surface II: Experiments on Ge, Si, Al and brass. Phys. Rev. B, 1983, 27(2): 1155~1172

    [2] [2] Demchuk A V, Labunov V A. Surface morphology and structure modification of silicon layers induced by nanosecond laser radiation. Appl. Sur. Sci., 1995, 86:353~358

    [3] [3] Yu J J, Yu Y G. Effects of rapid thermal annealing on ripple growth in excimer laser-irradiated silicon-dioxide/silicon substrates. Appl. Sur. Sci., 2000, 154~155:670~674

    [5] [5] Osgood R M, Ehrlich D J. Optically induced microstructures in laser-photodeposited metal films. Opt. Lett., 1982, 7(8):385~387

    [6] [6] Gorodetesky G, Kozyaka T G, Melcher R L et al.. Calorimetric and acoustic study of ultraviolet laser ablation of polymers. Appl. Phys. Lett., 1985, 46(9):828~830

    [7] [7] Lemons R A, Bocsh M A. Periodic motion of the crystallization front during beam annealing of Si films. Appl. Phys. Lett., 1981, 39(4):343~345

    [8] [8] Prokhorov M A, Konov I V. Laser Heating of Metals. New York: IOP Publishing Ltd., 1990. 115

    CLP Journals

    [1] Zhang Yongkang, Pei Xu, Chen Jufang, Gu Yongyu, Ren Aiguo, You Jian. Phenomenon and Analysis of Periodic Ripple Structure on Magnesium Alloy Surface Induced by Laser Shock Processing[J]. Acta Optica Sinica, 2010, 30(9): 2613

    [2] [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Crystallization of Amorphous Hydrogenated SiC Films by KrF Excimer Laser Annealing[J]. Acta Optica Sinica, 2008, 28(s2): 378

    [3] Zhang Rongtao, Xu Li, Wu Keyue. Emission of Low-Dimensional Structures Formed by Femtosecond Laser Interaction with Semiconductor[J]. Acta Optica Sinica, 2009, 29(3): 743

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of the Characteristics of the Surface Ripple on Si Material Irradiated by Pulsed Laser[J]. Acta Optica Sinica, 2004, 24(2): 239

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    Paper Information

    Category: Atomic and Molecular Physics

    Received: Dec. 31, 2002

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (yuanyh7693@sina.com)

    DOI:

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