Microelectronics, Volume. 51, Issue 4, 570(2021)
Research Progress of Thin Film SAW Devices
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ZHAO Cheng, ZHOU Jiacheng, YUAN Shuya, DENG Licheng, WANG Debo. Research Progress of Thin Film SAW Devices[J]. Microelectronics, 2021, 51(4): 570
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Received: Apr. 6, 2021
Accepted: --
Published Online: Feb. 21, 2022
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