Fig. 1. Schematic of vacuum focal field sampling measurement system

Fig. 2. Wave aberration optimization results of sampling optical path based on Zeman (without objective lens). Blue, green, and red curves denote 750 nm, 800 nm, and 850 nm, respectively

Fig. 3. Test of image conjugate relationship between deformable mirror (DM) and wavefront sensor (WFS)

Fig. 4. Parameters diagrams of ideal reference light (780 nm) after passing through sampling system. (a) Wavefront distortion; (b) far-field distribution

Fig. 5. Wavefront measured by sampling measurement system under air and vacuum conditions before deformable mirror correction

Fig. 6. Focal spot measured after wavefront correction by deformable mirror. (a) Under air condition; (b) under vacuum condition