Laser self-mixing interferometer for MEMS dynamic measurement

Frontiers of Optoelectronics, Volume. 6, Issue 2, 210(2013)

Zhaoyun ZHANG^1、*, Yang GAO^1,2, and Wei SU¹

Author Affiliations

¹Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China

²Key Laboratory of Optoelectronic Technology and System, Chongqing University, Chongqing 400030, China

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Zhaoyun ZHANG, Yang GAO, Wei SU. Laser self-mixing interferometer for MEMS dynamic measurement[J]. Frontiers of Optoelectronics, 2013, 6(2): 210

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Paper Information

Category: RESEARCH ARTICLE

Received: Feb. 4, 2013

Accepted: Mar. 18, 2013

Published Online: Mar. 3, 2014

The Author Email: Zhaoyun ZHANG (zzy_caep@163.com)

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