Fig. 1. (a) Rapid hot embossing device; (b) The hot embossing process

Fig. 2. (a) Sapphire mold and glass optical element; (b) Surface topography of sapphire mold; (c) The surface morphology of the glass microlens array formed by hot embossing; (d) Comparison of the surface profiles of the mold and the glass replica

Fig. 3. Vision detection device for micro-optical components

Fig. 4. (a) Flow chart of macro detection; (b) Flow chart of microscopic detection

Fig. 5. The calibration plate image acquired by the area scan camera

Fig. 6. (a) Original image; (b) The corrected image

Fig. 7. (a) Grayscale image; (b) Median-filtered image

Fig. 8. Result of the Canny operator edge detection

Fig. 9. Diagram of the scan sequence

Fig. 10. Automatic searching for template image

Fig. 11. (a) Image stitching of the mold; (b) Image stitching of the optical component

Fig. 12. (a) The processed image of mold; (b) The processed image of the optical element

Fig. 13. (a) Registration of the centers of the mold and the glass component; (b) Rotating the image of glass component

Fig. 14. Surface topography of the glass micro-optical components formed by embossing

Fig. 15. Roundness marking of the microlens array

Fig. 16. Replication deviation map of the microlens array between the mold and glass replica

Fig. 17. Fitting plot of deviation data along the X-axis