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Journal of Inorganic Materials, Volume. 40, Issue 6, 683(2025)

Application of Electron Energy-loss Spectroscopy to BaTiO3 Multi-layer Ceramic Capacitors

Lukang WU1, Zhengqian FU1, Ziyi YU1, Jun YANG2, Bin ZHOU1, Xuefeng CHEN1, and Fangfang XU1、*
Author Affiliations
  • 11. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
  • 22. Shenzhen Yuyang Technology Development Co., Ltd., Shenzhen 523686, China
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    (a) Schematic illustration of interaction between high-energy incident electrons and sample within TEM; (b) Principles of EDS and EELS
    1. (a) Schematic illustration of interaction between high-energy incident electrons and sample within TEM; (b) Principles of EDS and EELS

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    (a) Low magnified high angle annular dark field (HAADF) image of MLCC (yellow line is Ni electrode, red line is BaTiO3 dielectric layer); (b) Example area for grain size statistics and average grain size statistics
    2. (a) Low magnified high angle annular dark field (HAADF) image of MLCC (yellow line is Ni electrode, red line is BaTiO3 dielectric layer); (b) Example area for grain size statistics and average grain size statistics

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    (a) HAADF image of EDS mapping region; (b) EDS spectra (brown peaks marking the overlap of Ba-L and Ti-K peaks); (c) EDS surface distributions of Ba, Ti, O, and Ni
    3. (a) HAADF image of EDS mapping region; (b) EDS spectra (brown peaks marking the overlap of Ba-L and Ti-K peaks); (c) EDS surface distributions of Ba, Ti, O, and Ni

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    EDS and EELS spectra of the same microregion of MLCC samples
    4. EDS and EELS spectra of the same microregion of MLCC samples

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    (a) Microregion TEM image of MLCC cross-section sample; (b) EELS spectrum of BaTiO3 single grain identified in (a); (c) Average Ba/Ti atomic ratios of 100 BaTiO3 grains
    5. (a) Microregion TEM image of MLCC cross-section sample; (b) EELS spectrum of BaTiO3 single grain identified in (a); (c) Average Ba/Ti atomic ratios of 100 BaTiO3 grains

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    HAADF image of BaTiO3 single grain subjected to EELS line analysis and Ba/Ti ratios measured by line scanning (orange line indicating position of the line sweep)
    6. HAADF image of BaTiO3 single grain subjected to EELS line analysis and Ba/Ti ratios measured by line scanning (orange line indicating position of the line sweep)

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    EELS Ti-L2,3 edge fine structures of BaTiO3 grains with different sizes
    7. EELS Ti-L2,3 edge fine structures of BaTiO3 grains with different sizes

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    (a) Example HAADF image of dielectric-embedded electrodes; (b-g) EELS spectra for six random embedding positions (indicated by arrows in (a))
    8. (a) Example HAADF image of dielectric-embedded electrodes; (b-g) EELS spectra for six random embedding positions (indicated by arrows in (a))

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    Lukang WU, Zhengqian FU, Ziyi YU, Jun YANG, Bin ZHOU, Xuefeng CHEN, Fangfang XU. Application of Electron Energy-loss Spectroscopy to BaTiO3 Multi-layer Ceramic Capacitors [J]. Journal of Inorganic Materials, 2025, 40(6): 683

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    Paper Information

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    Received: Jan. 15, 2025

    Accepted: --

    Published Online: Sep. 2, 2025

    The Author Email: Fangfang XU (ffxu@mail.sic.ac.cn)

    DOI:10.15541/jim20250021

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology