Chinese Journal of Lasers, Volume. 44, Issue 1, 102006(2017)
Fabrication of Double-Helix Microstructures by Two-Photon Polymerization
Fig. 1. Intensity distribution at focal spot of double-helix beams superposed by five modes along lines with different slopes in LG modal plane
Fig. 2. Intensity distribution at focal spot of double-helix beams with different waist widths
Fig. 3. Flowchart of focal intensity optimization based on vector diffraction theory
Fig. 4. Optimization results. (a)(d) Phase masks; (b)(e) intensity distributions at focal spot; (c)(f) SEM images of polymerized structure with single-exposure; (upper) before optimization; (down) after optimization
Fig. 5. Schematic diagram of experimental setup for two-photon polymerization with single exposure
Fig. 6. SEM images of polymerized double-helix microstructures. (a) Double-helix microstructure array; (b) top and (c) side view of single double-helix microstructure
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Liu Lipu, Zhang Shijie, Yang Hong, Gong Qihuang, Li Yan. Fabrication of Double-Helix Microstructures by Two-Photon Polymerization[J]. Chinese Journal of Lasers, 2017, 44(1): 102006
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Received: Aug. 29, 2016
Accepted: --
Published Online: Jan. 10, 2017
The Author Email: Lipu Liu (lpliu@pku.edu.cn)