Fig. 1. Principle of calculating center position of centrosymmetric marker

Fig. 2. Subgraph interception and rotation process from target image

Fig. 3. Template matching principle based on gray-scale NCC

Fig. 4. Principle of 8-domain correlation calculating

Fig. 5. Substrate fine alignment marking process pictures and standard marking picture

Fig. 6. Comparison curves of HALCON NCC, HALCON Shape and SNCC matching score

Fig. 7. Defocus marker image and template

Fig. 8. Comparison curves of HALCON NCC, HALCON Shape and SNCC matching score for defocus markers