[1] [1] K Otaki, T Yamamoto, Y Fukuda, et al.. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror [J]. J Vac Sci Technol B, 2002, 20(1): 295-300.

[2] [2] Gary E Sommargren, Donald W Phillion, Michael A John, et al.. 100-picometer interferometry for EUVL [J]. SPIE, 2002, 4688: 316-328.

[3] [3] John S Taylor, Gray E Sommargren, Donald W Sweeney, et al.. The fabrication and testing of optics for EUV projection lithography [J]. 1998, 3331: 580-590.

[4] [4] Seiji Takeuchi, Osamu Kakuchi, Kenji Yamazoe, et al.. Visible light point-diffraction interferometer for testing of EUVL optics [C]. SPIE, 2006, 6151: 61510E.

[5] [5] Zheng Meng, Li Yanqiu, Liu Ke. Design of mask for phase-shifting point diffraction interferometer [J]. Laser & Optoelectronics Progress, 2013, 50(3): 031201.

[6] [6] Cai Lüzhong. Study on the interference fringe contrast between circularly polarization light and linearly polarization light or two circularly polarization lights [J]. College Physics, 2004, 23(1): 16-18.

[7] [7] Michael A Johnson, Donald W Phillion, Grey E Sommargren, et al.. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems [J]. SPIE, 2005, 5869: 58690P.

[8] [8] Lu Zengxiong. Research on the Deep Sub-Nanometer Accuracy Reference Wavefront in Phase Shifting Point Diffraction Interferometer [D]. Changchun: Changchun Insitute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2013.

[9] [9] Lu Zengxiong, Jin Chunshui, Ma Dongmei. Rigorous vector analysis of the effect of illumination objective lens aberration on the quality of far-field diffracted wave front [J]. Acta Optica Sinica, 2012, 32(8): 0812001.

[10] [10] Zhang Yu, Jin Chunshui, Ma Dongmei, et al.. Study of calibrating algorithm for wavefront reference source of point diffraction interferometer [J]. Chinese J Lasers, 2012, 39(3): 0308001.

[11] [11] Li Weiwen. Study of the Transparent Electro-Optic Ceramics Based Polarization Controller and Its Control Algorithm [D]. Hangzhou: Zhejiang University, 2005.

[12] [12] C D Poole, N S Bergano, R E Wagner, et al.. Polarization dispersion and principal states in a 147 km undersea lightwave cable [J]. J Lightwave Technol, 1988, 6(7): 1185-1190.

[13] [13] M Born, E Wolf. Principles of Optics [M]. Cambridge: Cambridge University Press, 1999.

[14] [14] K Kim, L Mandel, E Wolf. Relationship between Jones and Mueller matrices for randommedia [J]. J Opt Soc Am A, 1987, 3(4): 433-437.

[15] [15] Zhang Qiye, Zhu Yong, Su Yang, et al.. Research on the polar blind zone of the fiber squeezer polarization controller [J]. Acta Optica Sinica, 2013, 33(5): 0506001.