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Acta Optica Sinica, Volume. 31, Issue 11, 1122003(2011)

Magnification Tolerancing and Compensation for the Lithographic Projection Lens

Xu Weicai1,2、*, Huang Wei1, and Yang Wang1
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    Xu Weicai, Huang Wei, Yang Wang. Magnification Tolerancing and Compensation for the Lithographic Projection Lens[J]. Acta Optica Sinica, 2011, 31(11): 1122003

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    Paper Information

    Category: Optical Design and Fabrication

    Received: May. 6, 2011

    Accepted: --

    Published Online: Oct. 21, 2011

    The Author Email: Xu Weicai (xuweicaixx@163.com)

    DOI:10.3788/aos201131.1122003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology