Journal of Synthetic Crystals, Volume. 53, Issue 5, 818(2024)

Single-Sided Deposition of Poly-Si in TOPCon Solar Cells

DAI Tongguang*, TAN Xin, SONG Zhicheng, GUO Yonggang, YUAN Yajing, NI Yufeng, and WANG Liang
Author Affiliations
  • [in Chinese]
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    References(7)

    [1] [1] ZHANG Z. Research on tunneling oxide passivation contact (TOPCon) solar cells[D]. Kunming: Kunming University of Science and Technology, 2019 (in Chinese).

    [2] [2] XIAO Y P, LI G J. Concept and present situation of passive carrier selective exposure in silicon solar cells[J]. Chinese Journal of Power Sources, 2019, 43(11): 1897-1900 (in Chinese).

    [3] [3] SACHS E, PRUEGER G, GUERRIERI R. An equipment model for polysilicon LPCVD[J]. IEEE Transactions on Semiconductor Manufacturing, 1992, 5(1): 3-13.

    [4] [4] WANG J L, JIA Y J. Preparation of TOPCon solar cells by LPCVD method[J]. Journal of Synthetic Crystals, 2023, 52(1): 149-154 (in Chinese).

    [5] [5] ZHANG T, LIU D W, SONG Z C, et al. Research on surround coating removal technology for polysilicon[J]. Journal of Synthetic Crystals, 2020, 49(9): 1641-1645 (in Chinese).

    [6] [6] ZHOU Y. Study on key Issues in mass production of N-type tunneling oxide passivation contact solar cells [D]. Dalian: Dalian University of Technology, 2021 (in Chinese).

    [7] [7] TU H B, MA C, WANG X L, et al. The inluence factors causing color diference of silicon nitride film of crystalline silicon solar cell[J]. Chemical Intermediates, 2013, 10(5): 37-41 (in Chinese).

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    DAI Tongguang, TAN Xin, SONG Zhicheng, GUO Yonggang, YUAN Yajing, NI Yufeng, WANG Liang. Single-Sided Deposition of Poly-Si in TOPCon Solar Cells[J]. Journal of Synthetic Crystals, 2024, 53(5): 818

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    Paper Information

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    Received: Sep. 11, 2023

    Accepted: --

    Published Online: Aug. 22, 2024

    The Author Email: Tongguang DAI (tg334334@163.com)

    DOI:

    CSTR:32186.14.

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