[1] Soichi Ibaraki, Wolfgang Knapp. Indirect measurement of volumetric accuracy for three-axis and five-axis machine tools: A review[J]. International Journal of Automation Technology, 6, 110-124(2012).

[2] Yang J, Feng Q, Li J. Review on multi-degree-of-freedom motion error measurement methods for rotary-axis laser[J]. Laser & Optoelectronics Progress, 53, 090003(2016).

[3] Lou Z, Hao X, Liu L, et al. spindle radial motion error measurement using a circular grating and a autocollimator[J]. Optics and Precision ngineering, 27, 2053-2061(2019).

[4] [4] Huang B. Research on the spindle radial motion err of the numerical machine tools based on laser displacement sens[D]. Hangzhou: Zhejiang University, 2008. (in Chinese)

[5] [5] Sun C. Research on multidegreeoffreedom measurement method f precision engineering[D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics), 2021. (in Chinese)

[6] Lv Y, Feng Q, Liu L, et al. Six-degree-of-freedom measurement method based on multiple collimated beams[J]. Infrared and laser Engineering, 43, 3597-3602(2014).

[7] Liang R, Li W, Wang Z, et al. A method to decouple the geometric errors for rotary axis in a five-axis CNC machine[J]. Measurement Science and Technology, 31, 085007(2020).

[8] Li Q, Wang W, Zhang J, et al. All position-dependent geometric error identification for rotary axes of five-axis machine tool using double ball bar[J]. The International Journal of Advanced Manufacturing Technology, 110, 1351-1366(2020).

[9] Li F, Dong H, Wang J, et al. Error analysis of rotation positioning accuracy measured by laser tracker[J]. Mechanical and Electrical Equipment, 38, 59-63(2021).

[10] Bringmann B, Besuchet J P, Rohr L. Systematic evaluation of calibration methods[J]. CIRP Annals, 57, 529-532(2008).

[11] Xia H, Hu M, Zhang X. High precision of quadrature signals for homodyne interferometer[J]. Optics and Precision Engineering, 25, 2309-2316(2017).

[12] Li L. Application of laser interferometer in XY table measurement[J]. Equipment for Electronic Products Manufacturing, 49, 37-41(2020).

[13] Ping S, Fu Y, Zhang F, et al. Study on measurement method of mirror reflection laser tracking interferometric length measurement[J]. Infrared and Laser Engineering, 50, 20210624(2021).

[14] Li J, Feng Q, Bao C, et al. Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis[J]. Chinese Optics Letters, 17, 47-51(2019).

[15] Xing J, Zhao G. Research on compensation of laser interferometry[J]. Laser Journal, 41, 63-66(2020).