[1] [1] WANG T Y, LI B J, REN N F, et al. Influence of Al/Cu thickness ratio and deposition sequence on photoelectric property of ZnO/Al/Cu/ZnO multilayer film on PET substrate prepared by RF magnetron sputtering［J］. Materials Science in Semiconductor Processing, 2019, 91: 73-80.

[2] [2] KIM J H, YER I H. Characterization of ZnO nanowires grown on Ga-doped ZnO transparent conductive thin films: effect of deposition temperature of Ga-doped ZnO thin films［J］. Ceramics International, 2016, 42(2): 3304-3308.

[3] [3] PARK Y, NEHM F, MLLER-MESKAMP L, et al. Optical display film as flexible and light trapping substrate for organic photovoltaics［J］. Optics Express, 2016, 24(10): A974-A980.

[4] [4] GUILLN C, HERRERO J. TCO/metal/TCO structures for energy and flexible electronics［J］. Thin Solid Films, 2011, 520(1): 1-17.

[5] [5] RAIMONDI D L, KAY E. High resistivity transparent ZnO thin films［J］. Journal of Vacuum Science and Technology, 1970, 7(1): 96-99.

[6] [6] MINAMI T, NANTO H, TAKATA S. Highly conductive and transparent aluminum doped zinc oxide thin films prepared by RF magnetron sputtering［J］. Japanese Journal of Applied Physics, 1984, 23(Part 2, No. 1): L280-L282.

[7] [7] MINAMI T, NANTO H, TAKATA S. Highly conductive and transparent ZnO thin films prepared by RF magnetron sputtering in an applied external DC magnetic field［J］. Thin Solid Films, 1985, 124(1): 43-47.

[8] [8] AGURA H, SUZUKI A, MATSUSHITA T, et al. Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition［J］. Thin Solid Films, 2003, 445(2): 263-267.

[9] [9] DHAGE S R, BADGUJAR A C. Transparent conducting Al∶ZnO thin films on large area by efficient cylindrical rotating DC magnetron sputtering［J］. Journal of Alloys and Compounds, 2018, 763: 504-511.

[10] [10] PARK S M, IKEGAMI T, EBIHARA K. Effects of substrate temperature on the properties of Ga-doped ZnO by pulsed laser deposition［J］. Thin Solid Films, 2006, 513(1/2): 90-94.

[11] [11] PARK S H, PARK J B, SONG P K. Characteristics of Al-doped, Ga-doped and In-doped zinc-oxide films as transparent conducting electrodes in organic light-emitting diodes［J］. Current Applied Physics, 2010, 10(3): S488-S490.

[12] [12] PRASADA RAO T, SANTHOSH KUMAR M C. Physical properties of Ga-doped ZnO thin films by spray pyrolysis［J］. Journal of Alloys and Compounds, 2010, 506(2): 788-793.

[13] [13] DJESSAS K, BOUCHAMA I, GAUFFIER J L, et al. Effects of indium concentration on the properties of In-doped ZnO films: applications to silicon wafer solar cells［J］. Thin Solid Films, 2014, 555: 28-32.

[14] [14] LIN M C, CHANG Y J, CHEN M J, et al. Characteristics of Zr-doped ZnO thin films grown by atomic layer deposition［J］. Journal of the Electrochemical Society, 2011, 158(6): D395.

[15] [15] SHAO J Z, DONG W W, LI D, et al. Metal-semiconductor transition in Nb-doped ZnO thin films prepared by pulsed laser deposition［J］. Thin Solid Films, 2010, 518(18): 5288-5291.

[16] [16] CHANG H P, WANG F H, CHAO J C, et al. Effects of thickness and annealing on the properties of Ti-doped ZnO films by radio frequency magnetron sputtering［J］. Current Applied Physics, 2011, 11(1): S185-S190.

[17] [17] LIN S S, HUANG J L, AJGALIK P. The properties of Ti-doped ZnO films deposited by simultaneous RF and DC magnetron sputtering［J］. Surface and Coatings Technology, 2005, 191(2/3): 286-292.

[18] [18] LU Y M, CHANG C M, TSAI S I, et al. Improving the conductance of ZnO thin films by doping with Ti［J］. Thin Solid Films, 2004, 447/448: 56-60.

[19] [19] WANG F H, CHANG H P, CHAO J C. Improved properties of Ti-doped ZnO thin films by hydrogen plasma treatment［J］. Thin Solid Films, 2011, 519(15): 5178-5182.

[20] [20] ELLMER K. Resistivity of polycrystalline zinc oxide films: current status and physical limit［J］. Journal of Physics D: Applied Physics, 2001, 34(21): 3097-3108.

[21] [21] CATTIN L, BERNDE J C, MORSLI M. Toward indium-free optoelectronic devices: dielectric/metal/dielectric alternative transparent conductive electrode in organic photovoltaic cells［J］. Physica Status Solidi (a), 2013, 210(6): 1047-1061.

[22] [22] LEE S Y, KWON Y A, JANG G E. Effect of Ti buffer layer on optical characteristic of Si3N4/SnZnO/AZO/Ag/Ti/ITO multi-layer film［J］. Journal of Electroceramics, 2014, 33(1/2): 121-127.

[23] [23] LIU Y, QIAO Y D, NIE C J, et al. High photoelectric performance of Cu-based AZO multilayer films deposited via TiO2 barrier layer and oxygen-containing atmosphere［J］. Ceramics International, 2019, 45(18): 24303-24308.

[24] [24] ZGR , ALIVOV Y I, LIU C, et al. A comprehensive review of ZnO materials and devices［J］. Journal of Applied Physics, 2005, 98(4): 041301.

[25] [25] LOHMANN R, STERSCHULZE E, THOMA K, et al. Analysis of RF-sputtered TiB2 hard coatings by means of X-ray diffractometry and Auger electron spectroscopy［J］. Materials Science and Engineering: A, 1991, 139: 259-263.

[26] [26] DECREMPS F, PELLICER-PORRES J, SAITTA A M, et al. High-pressure Raman spectroscopy study of wurtzite ZnO［J］. Physical Review B, 2002, 65(9): 092101.

[27] [27] MONDAL P, DAS D. Effect of hydrogen in controlling the structural orientation of ZnO∶Ga∶H as transparent conducting oxide films suitable for applications in stacked layer devices［J］. Physical Chemistry Chemical Physics, 2016, 18(30): 20450-20458.

[28] [28] MOMOT A, AMINI M N, REEKMANS G, et al. A novel explanation for the increased conductivity in annealed Al-doped ZnO: an insight into migration of aluminum and displacement of zinc［J］. Phys Chem Chem Phys, 2017, 19(40): 27866-27877.

[29] [29] WU J, PAN Y K, CHEN L W, et al. Microstructure transformation and interface structure of Co/Pt nano-multilayers prepared by ion beam sputtering deposition (IBSD)［J］. Surface and Coatings Technology, 2004, 176(3): 357-364.

[30] [30] MOHANTY B C, JO Y H, YEON D H, et al. Stress-induced anomalous shift of optical band gap in ZnO∶Al thin films［J］. Applied Physics Letters, 2009, 95(6): 062103.

[31] [31] LIM J H, PARK S J. Contacts to ZnO［M］//Zinc Oxide Bulk, Thin Films and Nanostructures. Amsterdam: Elsevier, 2006: 267-283.

[32] [32] ZHU Y W, ZHANG H Z, SUN X C, et al. Efficient field emission from ZnO nanoneedle arrays［J］. Applied Physics Letters, 2003, 83(1): 144-146.

[33] [33] SIVARAMAKRISHNAN K, ALFORD T L. Metallic conductivity and the role of copper in ZnO/Cu/ZnO thin films for flexible electronics［J］. Applied Physics Letters, 2009, 94(5): 052104.