Spectroscopy and Spectral Analysis, Volume. 42, Issue 3, 954(2022)
Optimization of Working Parameters of Glow Discharge Optical Emission Spectrometry of High Barrier Aluminum Plastic Film
Fig. 3. GDOES sputtering depth profiles of samples under the same working pressure (750 Pa), power (20 W), pulsed frequency (3 000 Hz), duty cycle (0.187 5) and different sputtering gases and powers
(a): Ar gas; (b): Ar-O2
Fig. 6. (a)—(e) GDOES sputtering depth profiles of samples under the same working pressure (750 Pa), pulsed frequency (3 000 Hz), duty cycle (0.187 5) and different powers((a)20 W, (b)25 W, (c)30 W, (d)35 W, (e)40 W); (f) Measured and normalized Al intensity of (a)—(e) GDOES depth profiles
Fig. 9. Depth resolution of 16%~84% normalized Al intensity with different sputtering powers
Fig. 10. Measured GDOES Al depth profile under working pressure of 750 Pa and power of 20 W
Fig. 11. Measured and normalized Al intensity of GDOES depth profiles with different working pressures
Fig. 13. Depth resolution of 16%~84% normalized Al intensity with different pressures
Fig. 15. Measured and normalized Al intensity of GDOES depth profiles with sputtering gases Argon and mixtures of Argon and Oxygen
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Li-hong HU, Jin-tong ZHANG, Li-yun WANG, Gang ZHOU, Jiang-yong WANG, Cong-kang XU. Optimization of Working Parameters of Glow Discharge Optical Emission Spectrometry of High Barrier Aluminum Plastic Film[J]. Spectroscopy and Spectral Analysis, 2022, 42(3): 954
Category: Orginal Article
Received: Mar. 1, 2021
Accepted: May. 8, 2021
Published Online: Apr. 19, 2022
The Author Email: Li-hong HU (19lhhu@stu.edu.cn)