Spectroscopy and Spectral Analysis, Volume. 42, Issue 3, 954(2022)

Optimization of Working Parameters of Glow Discharge Optical Emission Spectrometry of High Barrier Aluminum Plastic Film

Li-hong HU1、*, Jin-tong ZHANG1、1;, Li-yun WANG2、2;, Gang ZHOU3、3;, Jiang-yong WANG1、1; *;, and Cong-kang XU1、1; *;
Author Affiliations
  • 11. Department of Physics, Shantou University, Shantou 515063, China
  • 22. Shantou Lucky Film Co., Ltd., Shantou 515064, China
  • 33. HORIBA (China) Trading Co., Ltd., Shanghai 200335, China
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    Figures & Tables(20)
    The principle of Pulsed-RF-GDOES
    FTIR spectrum of the sample
    GDOES sputtering depth profiles of samples under the same working pressure (750 Pa), power (20 W), pulsed frequency (3 000 Hz), duty cycle (0.187 5) and different sputtering gases and powers(a): Ar gas; (b): Ar-O2
    Layered structure of aluminum-plastic film
    Craters of the sample after GDOES depth profiling
    (a)—(e) GDOES sputtering depth profiles of samples under the same working pressure (750 Pa), pulsed frequency (3 000 Hz), duty cycle (0.187 5) and different powers((a)20 W, (b)25 W, (c)30 W, (d)35 W, (e)40 W); (f) Measured and normalized Al intensity of (a)—(e) GDOES depth profiles
    Relationship between sputtering time and sputtering power
    Definition of depth resolution
    Depth resolution of 16%~84% normalized Al intensity with different sputtering powers
    Measured GDOES Al depth profile under working pressure of 750 Pa and power of 20 W
    Measured and normalized Al intensity of GDOES depth profiles with different working pressures
    Relationship between sputtering time and pressure
    Depth resolution of 16%~84% normalized Al intensity with different pressures
    Definition of signal to noise ratio
    Measured and normalized Al intensity of GDOES depth profiles with sputtering gases Argon and mixtures of Argon and Oxygen
    • Table 1. Depth resolution for different powers

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      Table 1. Depth resolution for different powers

      功率/WΔt/s
      2010.8
      2511.4
      308.2
      359.2
      407.6
    • Table 2. Signal to noise ratio for different powers

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      Table 2. Signal to noise ratio for different powers

      功率/W信噪比
      20199.78
      25238.79
      30250.37
      35277.38
      40297.16
    • Table 3. Depth resolution for different pressure

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      Table 3. Depth resolution for different pressure

      溅射压强/PaΔt/s
      7508.5
      8509.0
      9508.3
      1 0508.2
      1 1508.3
    • Table 4. Signal to noise ratio of different pressure

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      Table 4. Signal to noise ratio of different pressure

      压强/Pa信噪比
      750249.39
      850258.43
      950225.92
      1 050181.59
      1 150216.42
    • Table 5. Signal to noise ratio and Depth resolution of different gas

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      Table 5. Signal to noise ratio and Depth resolution of different gas

      溅射气体信噪比Δt/s
      纯氩气138.2417.5
      氩-氧混合气210.6910.8
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    Li-hong HU, Jin-tong ZHANG, Li-yun WANG, Gang ZHOU, Jiang-yong WANG, Cong-kang XU. Optimization of Working Parameters of Glow Discharge Optical Emission Spectrometry of High Barrier Aluminum Plastic Film[J]. Spectroscopy and Spectral Analysis, 2022, 42(3): 954

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    Paper Information

    Category: Orginal Article

    Received: Mar. 1, 2021

    Accepted: May. 8, 2021

    Published Online: Apr. 19, 2022

    The Author Email: Li-hong HU (19lhhu@stu.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2022)03-0954-07

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