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Microelectronics, Volume. 55, Issue 4, 648(2025)

Capacitance Model of a MEMS Cantilever Beam Microwave Power Detection Chip

DING Zhiyin, CHEN Xin, SUN Haoyu, and WANG Debo
Author Affiliations
  • College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, P R China
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    DING Zhiyin, CHEN Xin, SUN Haoyu, WANG Debo. Capacitance Model of a MEMS Cantilever Beam Microwave Power Detection Chip[J]. Microelectronics, 2025, 55(4): 648

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    Paper Information

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    Received: Jul. 31, 2024

    Accepted: Sep. 9, 2025

    Published Online: Sep. 9, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240263

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology