Acta Optica Sinica, Volume. 28, Issue 12, 2307(2008)

Theoretical Study of Arbitrary Step-Height Measurement Based on Wavelength-Scanning Talbot Effect

Zhang Chengyi*, Li Chuanqi, and Pei Shixin
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  • [in Chinese]
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    References(10)

    [1] [1] Satish Kumar Dubey, Dalip Singh Mehta, Amitava Roy et al.. Wavelength-scanning Talbot effect and its application for arbitrary three-dimensional step height measurement[J] . Opt. Commun., 2007, 279: 13~19

    [2] [2] Dalip Singh Mehta, Satish Kumar Dubey, Chandra Shakher et al.. Two-wavelength Talbot effect and its application for three dimensional step-height measurement[J]. Appl. Opt., 2006, 45: 7602~7609

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    [5] [5] Huaisheng Wang. To measure chirped ultrashort laser pulse by the Talbot effect of a grating[J]. Opt. Commun., 2006, 259: 107~109

    [6] [6] Zhang Chengyi, Tao Chunkan. A imaging approach of two-dimensional object with subwavelength periodic structure based on moiré technique [J]. Acta Optica Sinica, 2007, 27(11): 1967~1972

    [7] [7] Zhang Chengyi, Tao Chunkan. Photonics study on imaging of one-dimensional periodic object with subwavelength structure[J]. Acta Optica Sinica, 2006, 26(11): 1651~1656

    [8] [8] Eugenio Garbusi, Jose A. Ferrari. Defect enhancement in periodic masks using 1/2-Talbot effect[J]. Opt. Commun., 2006, 259: 55~59

    [9] [9] Wang Shifan. Theory and Practice on Information Optics[M]. Beijing: Beijing University of Posts and Telecommunications Press, 2004. 73~76

    [10] [10] Max Born, Emil Wolf. Principles of Optics[M]. 7th ed., Cambridge,1999. 456~458

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    Zhang Chengyi, Li Chuanqi, Pei Shixin. Theoretical Study of Arbitrary Step-Height Measurement Based on Wavelength-Scanning Talbot Effect[J]. Acta Optica Sinica, 2008, 28(12): 2307

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Aug. 28, 2008

    Accepted: --

    Published Online: Dec. 17, 2008

    The Author Email: Chengyi Zhang (dzcy1@163.com)

    DOI:

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