Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

Tianlun Shen; Jinhai Si; Tao Chen; Xun Hou

doi:10.3788/LOP57.111419

Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111419(2020)

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

Tianlun Shen, Jinhai Si^*, Tao Chen^**, and Xun Hou

Shaanxi Key Laboratory of Information Photonics Technology, School of Electronic Science and Engineering, Faculty of Electronic and Information Science, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China

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Tianlun Shen, Jinhai Si, Tao Chen, Xun Hou. Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111419

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Paper Information

Category: Lasers and Laser Optics

Received: Mar. 31, 2020

Accepted: Apr. 28, 2020

Published Online: Jun. 2, 2020

The Author Email: Jinhai Si (jinhaisi@mail.xjtu.edu.cn), Tao Chen (tchen@mail.xjtu.edu.cn)

DOI:10.3788/LOP57.111419

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology