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Piezoelectrics & Acoustooptics, Volume. 44, Issue 3, 397(2022)

Development of MEMS Acoustic Wave Device Based on Al0.8Sc0.2N Piezoelectric Thin Film

HUANG Xiangjun1、*, DI Xiao1, LIU Ya2, LI Xin1, YI Yongjie1, WU Pengcheng1, AN Xing1, and ZHU Xin1
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    HUANG Xiangjun, DI Xiao, LIU Ya, LI Xin, YI Yongjie, WU Pengcheng, AN Xing, ZHU Xin. Development of MEMS Acoustic Wave Device Based on Al0.8Sc0.2N Piezoelectric Thin Film[J]. Piezoelectrics & Acoustooptics, 2022, 44(3): 397

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    Received: Mar. 21, 2022

    Accepted: --

    Published Online: Jul. 24, 2022

    The Author Email: Xiangjun HUANG (15153313656@163.com)

    DOI:10.11977/j.issn.1004-2474.2022.03.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology