Chinese Journal of Lasers, Volume. 19, Issue 8, 624(1992)
Study on the process of SiH4breakdown irradiated by frequency tunable TEA CO2laser
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the process of SiH4breakdown irradiated by frequency tunable TEA CO2laser[J]. Chinese Journal of Lasers, 1992, 19(8): 624
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