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Laser Journal, Volume. 45, Issue 11, 48(2024)

Research on chip surface defect detection method based on improved Convolutional Neural Network

LI Hao1, JIA Huayu1、*, LUO Biao2, and TANG Bao2
Author Affiliations
  • 1College of Electrical and Power Engineering, Taiyuan University of Technology, Taiyuan 030000, China
  • 2Accelink Technologies Co., Ltd, Wuhan 430000, China
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    LI Hao, JIA Huayu, LUO Biao, TANG Bao. Research on chip surface defect detection method based on improved Convolutional Neural Network[J]. Laser Journal, 2024, 45(11): 48

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    Paper Information

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    Received: Mar. 12, 2024

    Accepted: Jan. 17, 2025

    Published Online: Jan. 17, 2025

    The Author Email: JIA Huayu (jiahuayu@mail.xjtu.edu.cn)

    DOI:10.14016/j.cnki.jgzz.2024.11.048

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology