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Journal of Synthetic Crystals, Volume. 54, Issue 3, 470(2025)

Research Progress on Heterogeneous Substrate Integration Technology for Gallium Oxide

QU Zhenyu1, XU Wenhui1、*, JIANG Haodong2, LIANG Hengshuo1, ZHAO Tiancheng1, XIE Yinfei3, SUN Huarui3, ZOU Xinbo2, YOU Tiangui1, QI Hongji4,5, HAN Genquan6, and OU Xin1
Author Affiliations
  • 1State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China
  • 3Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System, Harbin Institute of Technology, Shenzhen, Shenzhen 518055, China
  • 4Advanced Laser and Optoelectronic Functional Materials Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 5Hangzhou Institute of Optics and Fine Mechanics, Hangzhou 311421, China
  • 6School of Microelectronics, Xidian University, Xi’an 710071, China
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    QU Zhenyu, XU Wenhui, JIANG Haodong, LIANG Hengshuo, ZHAO Tiancheng, XIE Yinfei, SUN Huarui, ZOU Xinbo, YOU Tiangui, QI Hongji, HAN Genquan, OU Xin. Research Progress on Heterogeneous Substrate Integration Technology for Gallium Oxide[J]. Journal of Synthetic Crystals, 2025, 54(3): 470

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    Paper Information

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    Received: Dec. 13, 2024

    Accepted: Apr. 23, 2025

    Published Online: Apr. 23, 2025

    The Author Email: XU Wenhui (xuwh@mail.sim.ac.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0315

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology