Chinese Optics Letters, Volume. 7, Issue 8, 08724(2009)

Research on the resolution of micro stereo lithography

Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, and Wenhao Huang
Author Affiliations
  • Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
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    CLP Journals

    [1] Jun Chang, Meifang Zou, Ruirui Wang, Shulong Feng, M. M. Talha, "All-reflective optical system design for extreme ultraviolet lithography," Chin. Opt. Lett. 8, 1082 (2010)

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    Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, Wenhao Huang, "Research on the resolution of micro stereo lithography," Chin. Opt. Lett. 7, 08724 (2009)

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    Paper Information

    Received: Nov. 4, 2008

    Accepted: --

    Published Online: Aug. 17, 2009

    The Author Email:

    DOI:10.3788/COL20090708.0724

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