Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Optics Letters, Volume. 7, Issue 10, 967(2009)

Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition

Xiudi Xiao1,2, Guoping Dong1,2, Hongbo He1, Hongji Qi1,3, Zhengxiu Fan1, and Jianda Shao1
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Shanghai Daheng Optics and Fine Mechanics Co., Ltd., Shanghai 201800, China
    • show less
    AbstractGet PDF
    References (26)
    Cited By (7)
    Tools
    Paper Information
    Topics
    References(26)

    [1] [1] K. Robbie, G. Beydaghyan, T. Brown, C. Dean, J. Adams, and C. Buzea, Rev. Sci. Instrum. 75, 1089 (2004).

    [2] [2] J.-Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S.-Y. Lin, W. Liu, and J. A. Smart, Nature Photon. 1, 176 (2007).

    [3] [3] A. C. van Popta, M. H. Hawkeye, J. C. Sit, and M. J. Brett, Opt. Lett. 29, 2545 (2004).

    [4] [4] K. Kaminska, T. Brown, G. Beydaghyan, and K. Robbie, Appl. Opt. 42, 4212 (2003).

    [5] [5] Q. Zhou, Z. Li, Y. Yang, and Z. Zhang, J. Phys. D 41, 152007 (2008).

    [6] [6] R. A. Tripp, R. A. Dluhy, and Y. Zhao, Nanotoday 3, (3-4) 31 (2008).

    [7] [7] A. K. Kalkan, M. R. Henry, H. Li, J. D. Cuiffi, D. J. Hayes, C. Palmer, and S. J. Fonash, Nanotechnol. 16, 1383 (2005).

    [8] [8] H. Kimura, J. Mizuki, S. Kamiyama, and H. Suzuki, Appl. Phys. Lett. 66, 2209 (1995).

    [9] [9] E. Atanassova, N. Stojadinovic, A. Paskaleva, D. Spassov, L. Vracar, and M. Georgieva, Semicond. Sci. Technol. 23, 075017 (2008).

    [10] [10] M. Matsui, H. Nagayoshi, G. Muto, S. Tanimoto, K. Kuroiwa, and J. Tarui, Jpn. J. Appl. Phys. 29, 62 (1990).

    [11] [11] P. Kofstad, J. Electrochem. Soc. 109, 776 (1962).

    [12] [12] J. D. T. Kruschwitz and W. T. Pawlewicz, Appl. Opt. 36, 2157 (1997).

    [13] [13] F. Rubio, J. Denis, J. M. Albella, and J. M. Martinez-Duart, Thin Solid Films 90, 405 (1982).

    [14] [14] C. Xu, H. Dong, Q. Xiao, J. Ma, Y. Jin, and J. Shao, Chinese J. Lasers (in Chinese) 35, 1595 (2008).

    [15] [15] X. He, J. Wu, L. Zhao, J. Meng, X. Gao, and X. Li, Solid State Commun. 147, 90 (2008).

    [16] [16] S. Wang, X. Fu, G. Xia, J. Wang, J. Shao, and Z. Fan, Appl. Surf. Sci. 252, 8734 (2006).

    [17] [17] J. Ni, Y. Zhu, Q. Zhou, and Z. Zhang, J. Am. Ceram. Soc. 91, 3458 (2008).

    [18] [18] R. Messier, V. C. Venugopal, and P. D. Sunal, J. Vac. Sci. Technol. A 18, 1538 (2000).

    [19] [19] J. A. Thornton, Annu. Rev. Mater. Sci. 7, 239 (1977).

    [20] [20] B. Dick and M. J. Brett, in Encyclopedia of Nanoscience and Nanotechnology. vol. 6 (American Scientific Publishers, Valencia, 2004) pp. 703-725.

    [21] [21] J. M. Nieuwenhuizen and H. B. Haanstra, Philips Tech. Rev. 27, 87 (1966).

    [22] [22] R. N. Tait, T. Smy, and M. J. Brett, Thin Solid Films 226, 196 (1993).

    [23] [23] Y. Wang, W. Zhang, Z. Fan, J. Huang, Y. Jin, J. Yao, and J. Shao, Chinese J. Lasers (in Chinese) 35, 760 (2008).

    [24] [24] V. Janicki, J. Sancho-Parramon, and H. Zorc, Thin Solid Films 516, 3368 (2008).

    [25] [25] G. Beydaghyan, K. Kaminska, T. Brown, and K. Robbie, Appl. Opt. 43, 5343 (2004).

    [26] [26] J. Wang, J. Shao, and Z. Fan, Opt. Commun. 247, 107 (2005).

    CLP Journals

    [1] Ning Wang, Jianda Shao, Kui Yi, Chaoyang Wei, "Experimental study of sweep control in e-beam evaporated optical coatings," Chin. Opt. Lett. 8, 621 (2010)

    [2] Mingdong Kong, Chun Guo, Bincheng Li, Wenyan He, Ming Wei, "Fabrication of multi-wavelength visible and infrared filter for solar atmosphere tomographic imaging," Chin. Opt. Lett. 15, 123101 (2017)

    [3] Linglin Zhu, Aijun Zeng, Fanyue Li, Huijie Huang, "Polarization Fizeau interferometer based on birefringent thin film," Chin. Opt. Lett. 10, 061201 (2012)

    Cited By

    [1] S. Tripathi, S. Maidul Haque, K. Divakar Rao, J. S. Misal, C. Pratap, N. K. Sahoo. Oxygen partial pressure dependent optical properties of glancing angle deposited (GLAD) Ta2O5 films deposited by magnetron sputtering, 1731, 080076(2016).

    [2] Bin Wang, Hong-Ji Qi, Wei Sun, Jun He, Jiao-Ling Zhao, Hu Wang, Yong-Qiang Hou. Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique. Chinese Physics B, 23, 117801(2014).

    [3] Jung Woo Leem, Jae Su Yu. Influence of oblique-angle sputtered transparent conducting oxides on performance of Si-based thin film solar cells. physica status solidi (a), 208, 2220(2011).

    Tools

    Get Citation

    Copy Citation Text

    Xiudi Xiao, Guoping Dong, Hongbo He, Hongji Qi, Zhengxiu Fan, Jianda Shao, "Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition," Chin. Opt. Lett. 7, 967 (2009)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Received: Dec. 22, 2008

    Accepted: --

    Published Online: Oct. 16, 2009

    The Author Email:

    DOI:10.3788/COL20090710.0967

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology