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Piezoelectrics & Acoustooptics, Volume. 44, Issue 3, 403(2022)

Simulation and Structure Optimization of Piezoelectric Micromachined Ultrasonic Transducer

YU Qing1,2, TI Jinming1,2, FAN Qingqing1, and LI Junhong1、*
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    YU Qing, TI Jinming, FAN Qingqing, LI Junhong. Simulation and Structure Optimization of Piezoelectric Micromachined Ultrasonic Transducer[J]. Piezoelectrics & Acoustooptics, 2022, 44(3): 403

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    Received: Apr. 28, 2022

    Accepted: --

    Published Online: Jul. 24, 2022

    The Author Email: Junhong LI (ljh@mail.ioa.ac.cn)

    DOI:10.11977/j.issn.1004-2474.2022.03.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology