Chinese Optics, Volume. 17, Issue 6, 1442(2024)
Development of phase delay mirrors for femtosecond laser systems
Fig. 2. Optical constant profiles of SiO2 and Nb2O5 obtained by computer fitting
Fig. 4. (a) Reflectance curve and (b) group delay dispersion curve of the designed phase-delayed reflector
Fig. 5. Structure of the film system of complementary mirror pairs for phase-delayed mirror
Fig. 6. (a) Reflectance curve and (b) group delay dispersion curve of the phase-delayed reflector combined with the complementary mirror
Fig. 7. (a) Reflectivity curve and (b) group delay dispersion curve of phase-delay reflector obtained by measurement and calculation
Fig. 8. Fitting results of refractive index of Nb2O5 material varying with temperature. (a) Substrate temperature varying with time; (b) refractive index of Nb2O5 varying with temperature
Fig. 12. Calculated and measured group delay dispersion curves of phase-delayed reflector
Table 1. Technical parameters of phase compensation mirrors
View tableView in ArticleTable 1. Technical parameters of phase compensation mirrors
参数 具体信息 基板 K9或者石英 入射角度/(°) 0°～3° 反射率/(%) ≥99%@970～1100 nm GDD/ $ {fs}^{2} $ −800@1030 nm GDD/ $ {fs}^{2} $ 0@1060 nm
Table 2. Film material deposition parameters
View tableView in ArticleTable 2. Film material deposition parameters
材料 Nb2O5 SiO2 基底温度( °C) 145 145 工作真空(Pa) 7.7×10−1 5.2×10−1 沉积速率(nm·s−1) 0.255 0.225 ICP气体 O2+Ar O2+Ar ICP参数 Power: 2.2 kW 电压： 510 V 电流： 14.5 A Power: 2.2 kW 电压： 730 V 电流： 8.5 A
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Hong-kun NIU, Jing ZHANG, Xiu-hua FU, Guo-shui MA, Hai-jun JIN, Fei YANG. Development of phase delay mirrors for femtosecond laser systems[J]. Chinese Optics, 2024, 17(6): 1442
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Received: Jan. 15, 2024
Accepted: Mar. 15, 2024
Published Online: Jan. 14, 2025
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