Optics and Precision Engineering, Volume. 33, Issue 8, 1212(2025)

Research on sensing mechanism and measurement model of magnetoresistive time-grating displacement based on spherical array

Ziran CHEN1,2, Lili QIN1,2, Wei WANG1,2, Xin XIONG1,2、*, Zhenyue LIU1,2, and Yonghai ZHENG1,2
Author Affiliations
  • 1Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing400054, China
  • 2Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology, Chongqing400054, China
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    Figures & Tables(24)
    Overall structure of magnetoresistive time-grating displacement sensor based on spherical array
    Variation of magnetic medium at induction windings with displacement x
    Schematic diagram of sensor displacement measurement
    Signal output of the moving ruler at different spatial positions
    Measurement errors and error spectrum with the conditions re=12.0 mm and different ri
    Measurement errors and error spectrum with the conditions re=12.5 mm and different ri
    Measurement errors and error spectrum with the conditions re=13.0 mm and different ri
    Excitation windings and induction windings of sensor prototype
    Experiment platform
    Structure diagram of the experimental platform
    Actual measurement errors and error spectrum with the conditions re=12.0 mm and different ri
    Actual measurement errors and error spectrum with the conditions re=12.5 mm and different ri
    Actual measurement errors and error spectrum with the conditions re=13.0 mm and different ri
    Stability error curve of sensor
    Measurement error curve within a pitch
    Measurement error spectrum within a pitch
    Experimental error of repeatability within a pitch
    Measurement error curves within full range of sensor
    Measurement error spectrum within full range of sensor
    Resolution test results of sensor
    • Table 1. Model simulation parameters

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      Table 1. Model simulation parameters

      模型仿真参数参数值
      激励信号幅值/A0.1
      激励信号频率/kHz10
      激励绕组半径/mm12
      激励绕组匝数5
      感应绕组半径/mm11
      感应绕组匝数5
      线圈材料Copper
      定尺基体材料PVC plastic
      钢球材料Steel_1008
      动尺基体材料PVC plastic
      传感器极距(W)/mm16
      步距/mm0.5
      激励/感应绕组厚度/mm1
    • Table 2. Optimization of coils size parameters

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      Table 2. Optimization of coils size parameters

      激励绕组半径/mm感应绕组半径/mm主要谐波分量与幅值/μm
      直流分量1次2次3次4次5次6次7次8次9次
      re=12.0ri=10.012.547.6743.343.634.842.613.363.273.281.84
      ri=11.013.657.8936.8510.469.096.070.590.610.911.29
      ri=12.041.1510.9177.7010.4318.097.873.801.325.604.07
      ri=13.02.6612.7240.1714.106.921.214.602.172.431.83
      re=12.5ri=10.519.1014.6165.083.986.172.583.431.552.941.23
      ri=11.56.3416.0547.4018.319.116.392.393.892.761.81
      ri=12.569.7843.3484.1223.511.894.683.604.232.812.03
      ri=13.563.2120.9176.6713.121.8410.222.903.890.872.67
      re=13.0ri=11.052.307.3641.7020.7712.118.222.556.081.854.18
      ri=12.061.698.7736.9520.8111.048.465.933.384.305.78
      ri=13.084.9812.3751.9028.6817.1011.243.329.666.433.82
      ri=14.028.7419.8349.9915.797.734.075.653.141.904.07
    • Table 3. Main harmonic components of measurement error within full range

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      Table 3. Main harmonic components of measurement error within full range

      谐波频次幅值/μm谐波频次幅值/μm
      64次36.3365次4.98
      直流分量11.0696次4.83
      128次7.9562次3.39
      32次5.9867次2.87
      63次5.25129次2.78
    • Table 4. Comparison of performance parameters of mainstream sensors

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      Table 4. Comparison of performance parameters of mainstream sensors

      传感器类型测量范围精度分辨力优势劣势

      Heidenhain

      LIDA400系列

      240~3 040 mm

      (需拼接)

      ±5 μm

      0.2 μm

      (100倍细分)

      高精度、高分辨力价格高、易受粉尘、油影响,精度与分辨力受精密刻划制造工艺的制约
      Magnescale SL110

      200~2 000 mm

      (需拼接)

      (50+10L/1 000) µm

      L:测量范围(mm)

      10 μm

      (500倍细分)

      成本低,可在油污、粉尘等恶劣环境中正常工作精度和分辨力受限,易受磁场影响
      本文传感器

      512 mm

      (量程可按需扩展,无需拼接)

      ±9.4 μm

      0.1 μm

      (无需细分)

      易安装,防水,抗油污、粉尘等污染的能力强,毫米级的传感单元降低了对加工工艺要求,成本低重量相对同类产品略重
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    Ziran CHEN, Lili QIN, Wei WANG, Xin XIONG, Zhenyue LIU, Yonghai ZHENG. Research on sensing mechanism and measurement model of magnetoresistive time-grating displacement based on spherical array[J]. Optics and Precision Engineering, 2025, 33(8): 1212

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    Paper Information

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    Received: Jan. 17, 2025

    Accepted: --

    Published Online: Jul. 1, 2025

    The Author Email: Xin XIONG (xinxiong@cqut.edu.cn)

    DOI:10.37188/OPE.20253308.1212

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