Fig. 1. Aspheric non-null interference detection system of Fizeau interferometer

Fig. 2. Retrace error diagram of aspherical non-null detection system of Fizeau interferometer

Fig. 3. Mapping relationship between motion parameters of micro-displacement platform and tilt coefficient of phase surface

Fig. 4. Distribution diagram of tilted phase measured by interferometer at different sampling points

Fig. 5. Actual calibration field of interferometry system used in this paper

Fig. 6. Relationship between Zernike aberration coefficients and tilt coefficients in X and Y directions. (a) 4^th item; (b) 12^th item; (c) 17^th item; (d) 21^th item; (e) 29^th item; (f) 36^th item

Fig. 7. Retrace error distribution of each sampling point of Fig. 3 in designed interferometry system

Fig. 8. Test platform. (a) X-ray reflectors; (b) test site map

Fig. 9. Measured interference fringe distribution. (a) Measured interference fringe; (b) schematic of subaperture division

Fig. 10. Aberration represented by Zernike polynomial in 7^th item

Fig. 11. Relationship between different parameters and aperture size after ideal aberration subtracting splicing surface shape. (a) Distribution curve of PV value with subaperture size; (b) distribution curve of RMS value with subaperture size

Fig. 12. Variation curve of computational efficiency with sub-aperture size

Fig. 13. Specular distribution of X-ray reflection with and without tilt. (a) With tilt; (b) without tilt

Fig. 14. Results are obtained by calibration method. (a) Retrace error distribution; (b) surface map of X-ray mirror

Fig. 15. Measurement results of splicing interferometry. (a) Retrace error distribution; (b) surface map of X-ray mirror