[1] MAMUN M A, FARHA A H, ER A O et al. Nanomechanical properties of NbN films prepared by pulsed laser deposition using nanoindendation[J]. Applied Surface Science, 258: 4308(2012).

[2] ZHANG K, BALASUBRAMANIAN K, OZSDOLAY B D et al. Growth and mechanical properties of epitaxial NbN(001) films on MgO(001)[J]. Surface and Coatings Technology, 288: 105(2016).

[3] TANG Z, WEN Z, LIU Y et al. Rapid experimental screening of high-entropy diborides for superior oxidation resistance[J]. Advanced Functional Materials, 34, 2312239(2024).

[4] YEH J W, CHEN S K, LIN S J et al. Nanostructured high-entropy alloys with multiple principal elements: novel alloy design concepts and outcomes[J]. Advanced Engineering Materials, 6: 299(2004).

[5] CANTOR B, CHANG I T H, KNIGHT P et al. Microstructural development in equiatomic multicomponent alloys[J]. Materials Science and Engineering: A, 375-377: 213(2004).

[6] SENKOV O N, WILKS G B, MIRACLE D B et al. Refractory high-entropy alloys[J]. Intermetallics, 18: 1758(2010).

[7] YEH J W. Alloy design strategies and future trends in high-entropy alloys[J]. JOM, 65: 1759(2013).

[8] ZHANG G J, WANG Y J. Non-order is the new order: high-entropy ceramics[J]. Journal of Inorganic Materials, 36, 337(2021).

[9] ROST C M, SACHET E, BORMAN T et al. Entropy-stabilized oxides[J]. Nature Communications, 6: 8485(2015).

[10] GILD J, ZHANG Y, HARRINGTON T et al. High-entropy metal diborides: a new class of high-entropy materials and a new type of ultrahigh temperature ceramics[J]. Scientific Reports, 6: 37946(2016).

[11] ALPER J S. The Gibbs phase rule revisited: interrelationships between components and phases[J]. Journal of Chemical Education, 76: 1567(1999).

[12] FRACCHIA M, CODURI M, GHIGNA P et al. Phase stability of high entropy oxides: a critical review[J]. Journal of the European Ceramic Society, 44: 585(2024).

[13] EVANS D, CHEN J, BOKAS G et al. Visualizing temperature- dependent phase stability in high entropy alloys[J]. npj Computational Materials, 7: 151(2021).

[14] YE Y F, WANG Q, LU J et al. High-entropy alloy: challenges and prospects[J]. Materials Today, 19: 349(2016).

[15] ZHANG Y, ZUO T T, TANG Z et al. Microstructures and properties of high-entropy alloys[J]. Progress in Materials Science, 61: 1(2014).

[16] MIRACLE D B, SENKOV O N. A critical review of high entropy alloys and related concepts[J]. Acta Materialia, 122: 448(2017).

[17] CHEN T K, SHUN T T, YEH J W et al. Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering[J]. Surface and Coatings Technology, 188/189: 193(2004).

[18] CHEN T K, WONG M S, SHUN T T et al. Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering[J]. Surface and Coatings Technology, 200: 1361(2005).

[19] LAI C H, LIN S J, YEH J W et al. Preparation and characterization of AlCrTaTiZr multi-element nitride coatings[J]. Surface and Coatings Technology, 201: 3275(2006).

[20] LEWIN E. Multi-component and high-entropy nitride coatings—a promising field in need of a novel approach[J]. Journal of Applied Physics, 127: 160901(2020).

[21] YAN X H, LI J S, ZHANG W R et al. A brief review of high- entropy films[J]. Materials Chemistry and Physics, 210: 12(2018).

[22] YUAN M, GAO X, GU X et al. Simultaneous enhancement of hardness and wear and corrosion resistance of high-entropy transition-metal nitride[J]. Journal of the American Ceramic Society, 106: 1356(2022).

[23] LO W L, HSU S Y, LIN Y C et al. Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias[J]. Surface and Coatings Technology, 401: 126247(2020).

[24] WANG Y, YANG Y, YANG H et al. Microstructure and wear properties of nitrided AlCoCrFeNi high-entropy alloy[J]. Materials Chemistry and Physics, 210: 233(2018).

[25] JHI S H, IHM J, LOUIE S G et al. Electronic mechanism of hardness enhancement in transition-metal carbonitrides[J]. Nature, 399: 132(1999).

[26] GU X, LIU C, GUO H et al. Sorting transition-metal diborides: new descriptor for mechanical properties[J]. Acta Materialia, 207: 116685(2021).

[27] GU X, LIU C, GAO X et al. Solving strength-toughness dilemma in superhard transition-metal diborides via a distinct chemically tuned solid solution approach[J]. Research, 6: 0035(2023).

[28] ZHANG R, GU X, ZHANG K et al. Core electron count as a versatile and accurate new descriptor for sorting mechanical properties of diverse transition metal compounds[J]. Advanced Materials, 35: 2304729(2023).

[29] IVANOVSKII A L. Ternary carbides and nitrides based on transition metals and subgroup ⅢB, ⅣB elements: electronic structure and chemical bonding[J]. Russian Chemical Reviews, 65: 461(1996).

[30] ABADIAS G, KANOUN M B, GOUMRI-SAID S et al. Electronic structure and mechanical properties of ternary ZrTaN alloys studied by ab initio calculations and thin-film growth experiments[J]. Physical Review B, 90: 144107(2014).

[31] LIU C, GAO X, ZHANG K et al. Exceptional strain strengthening and tuning of mechanical properties of TiN.[J]. Physical Review B, 106: 054112(2022).

[32] XU Y, LI G, XIA Y. Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by hipims[J]. Applied Surface Science, 523: 146529(2020).

[33] MA C H, HUANG J H, CHEN H. Nanohardness of nanocrystalline tin thin films[J]. Surface and Coatings Technology, 200: 3868(2006).

[34] LIU C, GU X, ZHANG K et al. Superhard metallic compound TaB₂via crystal orientation resolved strain stiffening[J]. Physical Review B, 105: 024105(2022).

[35] ZHAO S. Effects of local elemental ordering on defect-grain boundary interactions in high-entropy alloys[J]. Journal of Alloys and Compounds, 887: 161314(2021).

[36] ZHAO S. Role of chemical disorder and local ordering on defect evolution in high-entropy alloys[J]. Physical Review Materials, 5: 103604(2021).

[37] GLUDOVATZ B, HOHENWARTER A, CATOOR D et al. A fracture-resistant high-entropy alloy for cryogenic applications[J]. Science, 345: 1153(2014).

[38] PSHYK A V, VASYLENKO A, BAKHIT B et al. High-entropy transition metal nitride thin films alloyed with Al: microstructure, phase composition and mechanical properties[J]. Materials Design, 219: 110789(2022).

[39] CUI P, LI W, LIU P et al. Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films[J]. Journal of Alloys and Compounds, 834: 155063(2020).

[40] TUCK J R, KORSUNSKY A M, BULL S J et al. On the application of the work-of-indentation approach to depth-sensing indentation experiments in coated systems[J]. Surface Coatings Technology, 137: 217(2001).

[41] KRESSE G, HAFNER J. Ab initio molecular dynamics for liquid metals[J]. Physical Review B-Condensed Matter, 47: 558(1993).

[42] KRESSE G, FURTHMULLER J. Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set.[J]. Physical Review B, 54: 11169(1996).

[43] BLOCHL P E. Projector augmented-wave method[J]. Physical Review B-Condensed Matter, 50: 17953(1994).

[44] PERDEW J P, BURKE K, ERNZERHOF M. Generalized gradient approximation made simple[J]. Physical Review Letters, 77: 3865(1996).

[45] ZUNGER A, WEI S, FERREIRA L G et al. Special quasirandom structures[J]. Physical Review Letters, 65: 353(1990).

[46] MONKHORST H J, PACK J D. Special points for brillouin-zone integrations[J]. Physical Review B, 13: 5188(1976).

[47] PACK J D, MONKHORST H J. "Special points for brillouin-zone integrations"—a reply[J]. Physical Review B, 16: 1748(1977).

[48] ZOU Y, MA H, SPOLENAK R. Ultrastrong ductile and stable high-entropy alloys at small scales[J]. Nature Communications, 6: 7748(2015).

[49] FRITZE S, HANS M, RIEKEHR L et al. Influence of carbon on microstructure and mechanical properties of magnetron sputtered taw coatings[J]. Materials & Design, 196: 109070(2020).

[50] CHENG K H, LAI C H, LIN S J et al. Structural and mechanical properties of multi-element (AlCrMoTaTiZr)N_x coatings by reactive magnetron sputtering[J]. Thin Solid Films, 519: 3185(2011).

[51] CHANG C C, HSIAO Y T, CHEN Y L et al. Lattice distortion or cocktail effect dominates the performance of tantalum-based high- entropy nitride coatings[J]. Applied Surface Science, 577: 151894(2022).

[52] SHULUMBA N, ALLING B, HELLMAN O et al. Vibrational free energy and phase stability of paramagnetic and antiferromagnetic crn fromab initiomolecular dynamics[J]. Physical Review B, 89: 174108(2014).

[53] BALASUBRAMANIAN K, KHARE S, GALL D. Vacancy-induced mechanical stabilization of cubic tungsten nitride[J]. Physical Review B, 94: 174111(2016).

[54] ISAEV E I, SIMASK S I, ABRIKOSOV I A et al. Phonon related properties of transition metals, their carbides, and nitrides: a first- principles study[J]. Journal of Applied Physics, 101: 123519(2007).

[56] MORGAN W L. Universal resputtering curve[J]. Applied Physics Letters, 55: 106(1989).

[57] SENKOV O N, WILKS G B, SCOTT J M et al. Mechanical properties of Nb₂₅Mo₂₅Ta₂₅W₂₅ and V₂₀Nb₂₀Mo₂₀Ta₂₀W₂₀ refractory high entropy alloys[J]. Intermetallics, 19: 698(2011).

[58] ZAID H, TANAKA K, LIAO M et al. Self-organized growth of 111-oriented (VNbTaMoW)N nanorods on MgO(001)[J]. Nano Letters, 21: 577(2020).

[59] ZAID H, TANAKA K, CIOBANU C V et al. Growth of elastically- stiff, nanostructured, high-entropy alloy nitride, (VNbTaMoW) N/Al₂O₃(0001) thin film[J]. Scripta Materialia, 197: 113813(2021).

[60] SHIN C S, GALL D, HELLGREN N et al. Vacancy hardening in single-crystal TiN_x(001) layers[J]. Journal of Applied Physics, 93: 6025(2003).

[61] GU Z, HU C, HUANG H et al. Identification and thermodynamic mechanism of the phase transition in hafnium nitride films[J]. Acta Materialia, 90: 59(2015).

[62] BALASUBRAMANIAN K, HUANG L, GALL D. Phase stability and mechanical properties of Mo_1-xN_x with 0≤x≤1[J]. Journal of Applied Physics, 122: 195101(2017).

[63] QI Z, WU Z, ZHANG D et al. Microstructure, mechanical properties and oxidation behaviors of magnetron sputtered NbN_x coatings[J]. Journal of Alloys and Compounds, 675: 22(2016).

[64] LEE C, CHOU Y, KIM G et al. Lattice-distortion-enhanced yield strength in a refractory high-entropy alloy[J]. Advanced Materials, 32: e2004029(2020).

[65] GUO Z, YUAN W, SUN Y et al. Thermodynamic assessment of the Si-Ta and Si-W systems[J]. Journal of Phase Equilibria and Diffusion, 30: 564(2009).

[66] LEYLAND A, MATTHEWS A. On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour[J]. Wear, 246: 1(2000).

[67] DAHLQVIST M, JANSSON U, ROSEN J. Influence of boron vacancies on phase stability, bonding and structure of MB₂ (M = Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W) with AlB₂ type structure[J]. Journal of Physics: Condensed Matter, 27: 435702(2015).

[68] LU K, LEI Z, DENG S et al. Synergistic effects of grain sizes on the corrosion behavior and mechanical properties in a metastable high-entropy alloy[J]. Corrosion Science, 225: 111588(2023).

[69] NIE J, LIU Y, WANG F et al. Key roles of particles in grain refinement and material strengthening for an aluminum matrix composite[J]. Materials Science and Engineering: A, 801: 140414(2021).

[70] MA M D, HAN Y J, ZHAO A S et al. Ultrafine-grained high-entropy zirconates with superior mechanical and thermal properties[J]. Journal of Materiomics, 9: 370(2023).

[71] LEE C, SONG G, GAO M C et al. Lattice distortion in a strong and ductile refractory high-entropy alloy[J]. Acta Materialia, 160: 158(2018).

[72] WANG P, WU Y, LIU J et al. Impacts of atomic scale lattice distortion on dislocation activity in high-entropy alloys[J]. Extreme Mechanics Letters, 17: 38(2017).