[1] [1] LIU Q L,FAN Zh,WANG Y.Investigation on the structure and electronic properties of rare earth oxide stabilized t-ZrO2［J］.Jorunal of Functional Materials,2021,52(11):11087-11093 (in Chinese).

[2] [2] ZHANG J H， XIE L J， CHEN H， et al.Effects of doping and stress on electronic structure and optical properties of ZrO2 thin films［J］.Journal of Sichuan University(Natural Science Edition),2019,56(6):1145-1150(in Chinese).

[3] [3] ZHAO X H,WU Y,YIN X R,et al.The Effect of phase structure on the transmittance of ZrO2 ceramics［J］.Rare Metal Materials And Engineering,2018,47(S1):18-21 (in Chinese).

[4] [4] LI Q T,LI D,WANG Ch,et al.Study on stability of Ta2O5/Al2O3 laser gyro mirrors exposed in plasma［J］.Infrared and Laser Engineering,2020,49(S1):97-103 (in Chinese).

[5] [5] YU L Y,WANG W,LIU M J,et al.Effects of in-situ deposition temperature on performances of Ta2O5 thin films prepared by electron beam evaporation［J］.Semiconductor Technology,2020,45(8):632-637(in Chinese).

[6] [6] LIU B J,DUAN W B,LI D Q,et al.Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatings［J］.Acta Physica Sinica,2019,68(11): 114208(in Chinese).

[7] [7] LU Q P.Study on stress properties and stress deformation control of Ta2O5/SiO2 optical films deposited by ion beam sputtering［D］.Dalian:Dalian University of Technology，2019: 20-45 (in Chinese).

[8] [8] LIU H S,FU H,WANG L Sh,et al.Correlation between properties of Ta2O5 thin films and preparative parameters by ion beam sputtering deposition［J］.Infrared and Laser Engineering,2013,42(7):1770-1775 (in Chinese).

[9] [9] JIANG Y G,LIU H S,CHEN D,et al.Ultraviolet absorption film technology based on ion beam sputtering Ta2O5 thin films［J］.Optics and Precision Engineering,2019,27(3):527-532 (in Chinese).

[10] [10] LIU H S,JI Y Q,ZHANG F,et al.Dispersive properties of optical constants of some metallic oxide thin films in the mid-infrared regions［J］.Acta Optica Sinica,2014,34(8):0831003(in Chinese).

[11] [11] LIU H S,FU H,JI Y Q,et al.Adjusting methods of deposition rates of oxide films prepared by IBS technology［J］.Infrared and Laser Engineering,2014,43(7):2192-2197(in Chinese).

[12] [12] LIU H S,JIANG Ch H,WANG L Sh,et al.Applied research on the physical model for calculating optical constant of metal oxide films［J］.Spectroscopy and Spectral Analysis,2014,34(5):1163-1167(in Chinese).

[13] [13] CHANG Y H,JIN Ch Sh,LI Ch,et al.Optical properties of oxide thin films for deep ultraviolet［J］.Chinese Journal of Lasers,2011,38(12):1207004(in Chinese).

[14] [14] LI J P,FANG M,HE H B,et al.Model of stress evolution in polycrystalline oxide and composite thin films［J］.Acta Optica Sinica,2012,32(10):1031004 (in Chinese).

[15] [15] LI D,XIONG Sh M.Mid-Infrared properties of oxide coatings prepared by ion beam sputtering deposition［J］.Chinese Journal of Lasers,2015,42(1):0107002(in Chinese).

[16] [16] SHANG P,XIONG Sh M,LI L H,et al.Optical constants and properties of dual-ion-beam sputtering Ta2O5/SiO2 thin film by spectroscopy［J］.Acta Optica Sinica,2014,34(5):0531002(in Chinese).

[17] [17] LIN S L,LONG B,XIE Zh.Effects of annealing on optical properties of Ta2O5 film prepared by ion beam sputtering［J］.Journal of Qufu Normal University(Natural Science Editioin),2018,44(2):77-80 (in Chinese).

[18] [18] YUAN W J,SHEN W D,ZHENG X W,et al.Optical and mechanical properties and microstructures of Nb2O5,Ta2O5 and SiO2 thin films prepared by ion beam sputtering［J］.Acta Optica Sinica,2017,37(12):1231001 (in Chinese).

[19] [19] XU F F,HU Q,YANG B L.Study on the feasibility of measuring the band gap of rare earth oxide films by XPS［J］.Micronanoelectronic Technology,2013,50(3):190-193(in Chinese).

[20] [20] WANG Y D,WANG H F,YANG Sh Y,et al.Nano-indentation technique and its application in film coating system［J］.Surface Technology,2022,51(6):138-159(in Chinese).

[21] [21] YANG Z L,YANG Sh T,TIAN X H,et al.A calculation model for estimating residual stress based on nanoindentation［J］.Journal of Inner Mongolia University of Technology(Natural Science Edition),2022,41(4):318-323(in Chinese).

[22] [22] WANG J F,YANG Ch,LIU Y K,et al.Application progress of nanoindentation technology in characterization of shale mechanical properties［J］.Oil & Gas Geology,2022,43(2):477-488(in Chinese).

[23] [23] WANG Y Ch,LIU D K,LIU W,et al.A review: Application of nanointentation testing technology in GFRP materials［J］.Materials Reports,2021,35(19):19214-19222(in Chinese).

[24] [24] ZHAO Y X,MA H Ch,CHENG Z Q,et al.Micromechanical properties of electronic glass using nanoindentation technology［J］.Journal of Zhejing University(Engineering Science Edition),2021,55(5):984-990 (in Chinese).