To evaluate the effect of ion source assistance on different oxide films,TiO2,Ta2O5,ZrO2 and SiO2 were deposited with different radio frequency(RF) sources.The index and thickness were measured by a spectroscopic ellipsometer.The Young’s module and the hardness of these films were compared.Experiments show that the value of Young’ s module and hardness are increased,2 GPa for TiO2,4 GPa for Ta2O5,2 GPa for ZrO2,in accordance with the film index.The nano-indention method is effective in evaluating the ability of ion sources.