Fig. 1. Schematic of the UV laser system and transverse beam profiles of the amplified pulses at 1064 nm (ω), 532 nm (2ω), and 355 nm (3ω) measured at their maximum energies via relay imaging. RA, regenerative amplifier; MA, main amplifier; HR, high reflector; HWP, half-wave plate; PBS, polarization beam splitter; FR, Faraday rotator; TFP, thin-film plate; QWP, quarter-wave plate; PC, Pockels cell; LD, laser diode; DM, dichroic mirror.

Fig. 2. Time-domain waveforms of (a) an unmodulated 1064 nm seed laser pulse, (b) its corresponding 355 nm output, (c) a programmed 1064 nm seed laser pulse, and (d) its corresponding 355 nm output.

Fig. 3. Relationship between THG conversion efficiency and the measured pulse width (FWHM) of the 355 nm output laser.

Fig. 4. (a) Ideal ensquared energy of a focused flat-top beam and the actually measured ensquared energy of various far-field laser beams: (b) 355 nm, (c) 532 nm, and (d) 1064 nm measured at their maximum energies.

Fig. 5. Energy stability of 1064 nm and 355 nm laser pulses.