Chinese Journal of Lasers, Volume. 27, Issue 3, 253(2000)
Study on the Mechanism of Optically Excited Micro Silicon Beam Vibration
References(2)
[1] [1] S. Venkatesh, B. Culshaw. Optically activated vibrations in a micromachined silica structure. Electron. Lett., 1985, 21(8):315～317
[2] [2] D. Uttamchandani, K. E. B. Thornton, B. Culshaw. Optically excited resonant beam pressure sensor. Electron. Lett., 1987, 23(25):1333～1334
Tools
Get Citation
Copy Citation Text
[in Chinese]. Study on the Mechanism of Optically Excited Micro Silicon Beam Vibration[J]. Chinese Journal of Lasers, 2000, 27(3): 253
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20