Opto-Electronic Engineering, Volume. 35, Issue 10, 116(2008)
Control System for Wafer Transport Device Based on High-precision Prealigner
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SONG Yi-xu, YANG Ze-hong, LI Shi-chang, ZHAO Yan-nan. Control System for Wafer Transport Device Based on High-precision Prealigner[J]. Opto-Electronic Engineering, 2008, 35(10): 116
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Received: Jan. 5, 2008
Accepted: --
Published Online: Mar. 1, 2010
The Author Email: Yi-xu SONG (songyixu@163.com)
CSTR:32186.14.
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