Laser & Optoelectronics Progress, Volume. 62, Issue 15, 1522001(2025)
Process Method of Small-Tool Polishing for Mid-Spatial Frequency Error Smoothing of Conical Surface Component
Currently, the conformal accuracy of small-tool smoothing polishing is low and does not satisfy the requirements of mid-spatial frequency (MSF) error smoothing. Hence, a small-tool polishing method for the MSF error smoothing of conical surface components based on a variable removal function is proposed. By performing theoretical modeling and finite-element simulation, the contact pressure distribution and the relative velocity model of conical surface components are established. Subsequently, based on Preston's equation, an annular removal function model is developed. By adopting the convolution principle and the constrained optimization algorithm, the dwell-time model for the small-tool polishing of conical surface components and its algorithm for conformal polishing are established. Small-tool polishing for the MSF error smoothing of conical surface components is investigated experimentally. The results show that the relative changes in the peak-to-valley value and root mean square are 13.7% and 9.3%, respectively, for a 310-mm-diameter conical mirror after smoothing. The peak value in the MSF band of the power spectral density curve decreased significantly, and the MSF error is effectively suppressed, thus confirming the correctness and feasibility of the proposed method.
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Hang Fang, Yuchuan Chen, Lin Zhang, Ye Ding, Kailong Li, Kuo Hai, Yunfei Zhang. Process Method of Small-Tool Polishing for Mid-Spatial Frequency Error Smoothing of Conical Surface Component[J]. Laser & Optoelectronics Progress, 2025, 62(15): 1522001
Category: Optical Design and Fabrication
Received: Nov. 25, 2024
Accepted: Jan. 6, 2025
Published Online: Jul. 2, 2025
The Author Email: Yunfei Zhang (zhangyf306@yeah.net)
CSTR:32186.14.LOP242316