Fig. 1. Schematic of experimental setup of deflectometry

Fig. 2. Beam path diagram of PMD model

Fig. 3. Reconstructed surface errors of PMD model

Fig. 4. Relationship between tested surface errors and geometric calibration errors in PMD model. PV values of error surfaces change with (a) Δx, (b) Δy and (c) Δz

Fig. 5. Relationship between tilt surface errors and geometric calibration errors in PMD model. (a) In x direction; (b) in y direction

Fig. 6. Relationship between defocus surface errors and geometric calibration errors in PMD model. (a) ΔzC(ΔzM2C),ΔzS(ΔzM2S),ΔzM; (b) ΔzM

Fig. 7. Measured results of the tested surface using interferometer. (a) Zernike coefficients; (b) wavefront aberration

Fig. 8. Measured results of the tested surface using PMD system

Fig. 9. Measured surfaces change with z-coordinate translation of mirror. (a) PV of tested surface; (b) defocus coefficient of tested surface