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Opto-Electronic Engineering, Volume. 34, Issue 6, 53(2007)

Filling factor fast detecting method for microlens array

[in Chinese]1,2,3, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [1] [1] Chunlei DU,Xiaochun DONG,Qiling DENG,et al.Profile control technology for high performance microlens array[J].Opt.Eng,2004,43:2840-2844.

    [2] [2] D.KWO,G.DAMAS,W.ZMEK.A Hartmann-Shack wavefront sensor using a binary optical lenslet array[J].SPIE,1991,1544:66-74.

    [3] [3] M.P.RAO,M.F.AIMI,N.C.MACDONALD.Single-mask,three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation[J].Applied Physics Letters,2004,85(25):6281-6283.

    [4] [4] X-C YUAN,W.X YU,N.Q.NGO,et al.Cost-effective fabrication ofmicrolenses on hybrid solgel glass with a high-energy beam-sensitive gray-scale mask[J].Opt.Express,2002,10:303-308.

    [5] [5] P.(A)YR(A)S,J.T.RANTALA,R.LEVY,et al.Multilevel structures in soigel thin films with a single UV-exposure using a gray-scale mask[J].Thin Solid films,1999,352:9-12.

    [6] [6] OPPLIGER P.SIXT,J.M.STAUFFER,J.M.MAYER,et al.One-step 3D shaping using a gray-tone mask for optical and microelectronic applications[J].Mieroelectron.Eng,1994,23:449-454.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Filling factor fast detecting method for microlens array[J]. Opto-Electronic Engineering, 2007, 34(6): 53

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    Paper Information

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    Received: Dec. 18, 2006

    Accepted: --

    Published Online: Nov. 14, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology