Optical Instruments, Volume. 43, Issue 6, 64(2021)

An apparatus for inspecting adjacent surfaces defects of TEC component based on equal-optical-path polarization splitting imaging

Tingdi LIAO1,2,3, Shaobin YAN1, Qilu HUANG1,2,3, Yantang HUANG2, and Xudong CUI1
Author Affiliations
  • 1Research Center for Photonics Technology, Quanzhou Normal University, Quanzhou 362000, China
  • 2Fujian Provincial Key Laboratory for Advanced Micro-nano Photonics Technology and Devices, Quanzhou 362000, China
  • 3Fujian Provincial Collaborative Innovation Center for Ultra-Precision Optical Engineering and applications, Quanzhou 362000, China
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    References(6)

    [3] MAR N S S, YARLAGADDA P K D V, FOOKES C. Design and development of automatic visual inspection system for PCB manufacturing[J]. Robotics and Computer-Integrated Manufacturing, 27, 949-962(2011).

    [4] NEOGI N, MOHANTA D K, DUTTA P K. Review of vision-based steel surface inspection systems[J]. EURASIP Journal on Image and Video Processing, 2014, 50(2014).

    [5] YANG S W, LIN C S, LIN S K, et al. Automatic defect recognition of TFT array process using gray level co-occurrence matrix[J]. Optik, 125, 2671-2676(2014).

    [6] LIU Y, YU F H. Automatic inspection system of surface defects on optical IR-CUT filter based on machine vision[J]. Optics and Lasers in Engineering, 55, 243-257(2014).

    [10] [10] SU L L, WU P H, GUO Z W, et al. An optical apparatus f machine vision inspecting both top bottom surfaces of the TEC components[C]Proceedings of the SPIE 11338, AOPC 2019: Optical Sensing Imaging Technology. Beijing: SPIE, 113383C.

    [12] [12] JOHNSON J L. Infrared polarization signature feasibility tests[R]. U. S. Army Mobility Equipment Research Development Center, 1974.

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    Tingdi LIAO, Shaobin YAN, Qilu HUANG, Yantang HUANG, Xudong CUI. An apparatus for inspecting adjacent surfaces defects of TEC component based on equal-optical-path polarization splitting imaging[J]. Optical Instruments, 2021, 43(6): 64

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    Paper Information

    Category: INSTRUMENTS

    Received: Jul. 20, 2021

    Accepted: --

    Published Online: Jun. 29, 2022

    The Author Email:

    DOI:10.3969/j.issn.1005-5630.2021.06.011

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