Chinese Journal of Lasers, Volume. 43, Issue 6, 603001(2016)
Effect of Substrate′s Crystalline Structure on Crystalline and Mechanical Properties of HfO2 Thin Films
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Guo Jialu, Liu Xiaofeng, Zhao Yuanan, Shao Jianda, Zhao Jiaoling, Huang Haopeng, Cui Yanyan. Effect of Substrate′s Crystalline Structure on Crystalline and Mechanical Properties of HfO2 Thin Films[J]. Chinese Journal of Lasers, 2016, 43(6): 603001
Category: materials and thin films
Received: Feb. 1, 2016
Accepted: --
Published Online: Jun. 6, 2016
The Author Email: Jialu Guo (guojialu@siom.ac.cn)