Fig. 1. Simplified image of pixel array of electron irradiation on CCD

Fig. 2. Trajectories of electrons in silicon at the electron energy of 1 MeV

Fig. 3. Schematic diagram of photon generation in silicon

Fig. 4. Energy deposition of electrons in silicon at the electron energy of 1 MeV

Fig. 5. Range of electrons in silicon and silicon dioxide

Fig. 6. Energy deposition of CCD pixel irradiated by the 30 keV electron beam

Fig. 7. Energy deposition of CCD pixel irradiated by 5 keV to 1 MeV electron beams

Fig. 8. Energy deposition in pixel 2

Fig. 9. Energy deposition in pixel 3

Fig. 10. Comparison results of DPA in pixel 2 with and without boundary

Fig. 11. Trajectories of electrons in CCD without and with boundary